Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11094579 | Method of forming shallow trench isolation structure | Chien-Mao Chen, Yu-Hsuan Kuo, Shih-Kai Fan, Chia-Hung Lai, Kang-Min Kuo | 2021-08-17 |
| 10699938 | Shallow trench isolation structure and method of forming the same | Chien-Mao Chen, Yu-Hsuan Kuo, Shih-Kai Fan, Chia-Hung Lai, Kang-Min Kuo | 2020-06-30 |
| 8046860 | System and method for removing particles in semiconductor manufacturing | Chen-Yuan Hsia, Chang-Cheng Hung, Chi-Lun Lu, Shih-Ming Chang, Wen-Chuan Wang +2 more | 2011-11-01 |
| 7819980 | System and method for removing particles in semiconductor manufacturing | Chen-Yuan Hsia, Chang-Cheng Hung, Chi-Lun Lu, Shih-Ming Chang, Wen-Chuan Wang +2 more | 2010-10-26 |
| 7759136 | Critical dimension (CD) control by spectrum metrology | Chang-Cheng Hung, Hung-Chang Hsieh, Shih-Ming Chang, Wen-Chuan Wang, Chi-Lun Lu +1 more | 2010-07-20 |
| 7460251 | Dimension monitoring method and system | Shih-Ming Chang, Chen-Yuan Hsia, Wen-Chuan Wang, Chi-Lun Lu, Chang-Cheng Hung +4 more | 2008-12-02 |