Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8589828 | Reduce mask overlay error by removing film deposited on blank of mask | Hsin-Chang Lee, Chia-Jen Chen, Anthony Yen | 2013-11-19 |
| 7924405 | Compensation of reticle flatness on focus deviation in optical lithography | Hsin-Chang Lee, Chia-Jen Chen, Tzu Yi Wang | 2011-04-12 |
| 7906252 | Multiple resist layer phase shift mask (PSM) blank and PSM formation method | Hsin-Chang Lee, Chia-Jen Chen, Hong-Chang Hsieh | 2011-03-15 |
| D541007 | Tape and strap cutting glove | Shian Zhao | 2007-04-24 |