Issued Patents All Time
Showing 101–125 of 153 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7399709 | Complementary replacement of material | Hua-Tai Lin, Ru-Gun Liu, Tsai-Sheng Gau, Bang-Chien Ho | 2008-07-15 |
| 7394080 | Mask superposition for multiple exposures | — | 2008-07-01 |
| 7384726 | Resist collapse prevention using immersed hardening | Ching-Yu Chang | 2008-06-10 |
| 7371671 | System and method for photolithography in semiconductor manufacturing | Ching-Yu Chang, Chin-Hsiang Lin | 2008-05-13 |
| 7356380 | Process control method | Shing-Sheng Yu, Chih-Ming Ke | 2008-04-08 |
| 7314689 | System and method for processing masks with oblique features | Ping-Che YANG, Hong-Chang Hsieh, Yao-Ching Ku, Chin Hsian Lin, Chiu-Shan Yoo | 2008-01-01 |
| 7307001 | Wafer repair method using direct-writing | Chin-Hsiang Lin, Tsai-Sheng Gau | 2007-12-11 |
| 7279267 | Method for manipulating the topography of a film surface | Tsai-Sheng Gau | 2007-10-09 |
| 7266803 | Layout generation and optimization to improve photolithographic performance | Shou-Yen Chou, Jaw-Jung Shin, Tsai-Sheng Gau | 2007-09-04 |
| 7252909 | Method to reduce CD non-uniformity in IC manufacturing | Jaw-Jung Shin, Chih-Ming Ke | 2007-08-07 |
| 7234128 | Method for improving the critical dimension uniformity of patterned features on wafers | Tsai-Sheng Gau, Jaw-Jung Shin, Jan-Wen You | 2007-06-19 |
| 7224427 | Megasonic immersion lithography exposure apparatus and method | Ching-Yu Chang, Chien-Hung Lin, Chin-Hsiang Lin, David Lu, Horng-Huei Tseng | 2007-05-29 |
| 7180572 | Immersion optical projection system | Jen-Chieh Shih, Tsai-Sheng Gau, Ru-Gun Liu, Chun-Kuang Chen, Chin-Hsiang Lin +1 more | 2007-02-20 |
| 7151593 | Method for imaging wafers using a projection mask aligner | — | 2006-12-19 |
| 7131102 | Full sized scattering bar alt-PSM technique for IC manufacturing in sub-resolution era | Chang-Ming Dai, Chung-Hsing Chang, Jan-Wen You | 2006-10-31 |
| 7091502 | Apparatus and method for immersion lithography | Tsai-Sheng Gau, Chun-Kuang Chen, Ru-Gun Liu | 2006-08-15 |
| 7061589 | Apparatus and method for mounting a hard pellicle | — | 2006-06-13 |
| 7036108 | Full sized scattering bar alt-PSM technique for IC manufacturing in sub-resolution era | Chang-Ming Dai, Chung-Hsing Chang, Jan-Wen You | 2006-04-25 |
| 7013453 | Full sized scattering bar alt-PSM technique for IC manufacturing in sub-resolution ERA | Chang-Ming Dai, Chung-Hsing Chang, Jan-Wen You | 2006-03-14 |
| 7002165 | Apparatus and method for repairing resist latent images | — | 2006-02-21 |
| 6998198 | Contact hole printing by packing and unpacking | Shinn-Sheng Yu, Bang-Chein Ho | 2006-02-14 |
| 6982135 | Pattern compensation for stitching | Chung-Hsing Chang, Chien-Hung Lin, Chia-Hui Lin, Chih-Cheng Chin, Chin-Hsiang Lin +3 more | 2006-01-03 |
| 6973636 | Method of defining forbidden pitches for a lithography exposure tool | Jaw-Jung Shin, Chun-Kuang Chen, Tsai-Sheng Gau, Li-Chun Tien, Mi-Chang Chang +4 more | 2005-12-06 |
| 6934008 | Multiple mask step and scan aligner | — | 2005-08-23 |
| 6929887 | Printable assist lines and the removal of such | Ru-Gyn Liu, Gue-Wuu Hwang | 2005-08-16 |