Issued Patents All Time
Showing 201–225 of 254 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6992831 | Lens sheet and method for producing it | Atsushi Nagasawa, Takahiro Kitano, Katsuya Fujisawa, Tatsufumi Watanabe | 2006-01-31 |
| 6974909 | IC module, and wireless information-storage medium and wireless information-transmitting/receiving apparatus including the IC module | Hiroyuki Takubo, Shigenobu Abe | 2005-12-13 |
| 6966346 | Gas supply apparatus and gas supply method | Takashi Orita, Makoto Echigojima | 2005-11-22 |
| 6963028 | IC module, and wireless information-storage medium and wireless information-transmitting/receiving apparatus including the IC wireless | Hiroyuki Takubo, Shigenobu Abe | 2005-11-08 |
| 6939435 | Plasma processing apparatus and processing method | Hiroyuki Kitsunai, Hideyuki Yamamoto, Shoji Ikuhara, Akira Kagoshima | 2005-09-06 |
| 6916396 | Etching system and etching method | Akira Kagoshima, Motohiko Yoshigai, Hideyuki Yamamoto, Daisuke Shiraishi, Kenji Tamaki +1 more | 2005-07-12 |
| 6908529 | Plasma processing apparatus and method | Hideyuki Yamamoto, Akira Kagoshima, Shoji Ikuhara, Daisuke Shiraishi | 2005-06-21 |
| 6902683 | Plasma processing apparatus and plasma processing method | Tetsunori Kaji, Shinichi Tachi, Toru Otsubo, Katsuya Watanabe, Katsuhiko Mitani | 2005-06-07 |
| 6899766 | Diagnosis method for semiconductor processing apparatus | Go Miya, Tsutomu Tetsuka, Hideyuki Yamamoto | 2005-05-31 |
| 6881352 | Disturbance-free, recipe-controlled plasma processing method | Akira Kagoshima, Hideyuki Yamamoto, Shoji Ikuhara, Toshio Masuda, Hiroyuki Kitsunai +2 more | 2005-04-19 |
| 6879867 | Process monitoring device for sample processing apparatus and control method of sample processing apparatus | Hiroyuki Kitsunai, Hideyuki Yamamoto, Shoji Ikuhara, Kazue Takahashi | 2005-04-12 |
| 6866744 | Semiconductor processing apparatus and a diagnosis method therefor | Go Miya, Tsutomu Tetsuka, Hideyuki Yamamoto | 2005-03-15 |
| 6841032 | Plasma processing apparatus for adjusting plasma processing through detecting plasma processing state within chamber | Shoji Ikuhara, Hideyuki Yamamoto | 2005-01-11 |
| 6828165 | Semiconductor plasma processing apparatus with first and second processing state monitoring units | Hiroyuki Kitsunai, Akira Kagoshima, Daisuke Shiraishi, Hideyuki Yamamoto, Shoji Ikuhara +1 more | 2004-12-07 |
| 6798576 | Lens sheet and method for producing it | Atsushi Nagasawa, Takahiro Kitano, Katsuya Fujisawa, Tatsufumi Watanabe | 2004-09-28 |
| 6789583 | Gas supply apparatus and gas supply method | Takashi Orita, Makoto Echigojima | 2004-09-14 |
| 6776872 | Data processing apparatus for semiconductor processing apparatus | Toshio Masuda, Akira Kagoshima, Shoji Ikuhara, Hideyuki Yamamoto | 2004-08-17 |
| D493445 | Speaker | Takekazu Iijima, Koji Nakane | 2004-07-27 |
| D493161 | Speaker | Takekazu Iijima, Koji Nakane | 2004-07-20 |
| 6747239 | Plasma processing apparatus and method | Hiroyuki Kitsunai, Ryoji Nishio, Seiichiro Kanno, Hideyuki Yamamoto | 2004-06-08 |
| 6745096 | Maintenance method and system for plasma processing apparatus etching and apparatus | Hideyuki Yamamoto, Toshio Masuda, Shoji Ikuhara, Akira Kagoshima | 2004-06-01 |
| 6743733 | Process for producing a semiconductor device including etching using a multi-step etching treatment having different gas compositions in each step | Hiroyuki Kitsunai, Takashi Fujii, Motohiko Yoshigai | 2004-06-01 |
| 6733618 | Disturbance-free, recipe-controlled plasma processing system and method | Akira Kagoshima, Hideyuki Yamamoto, Shoji Ikuhara, Toshio Masuda, Hiroyuki Kitsunai +2 more | 2004-05-11 |
| 6716301 | Semiconductor manufacturing apparatus and method of processing semiconductor wafer using plasma, and wafer voltage probe | Seiichiro Kanno, Ryoji Nishio, Tsutomu Tetsuka, Hideyuki Yamamoto, Kazuyuki Ikenaga +1 more | 2004-04-06 |
| 6706543 | Method of monitoring and/or controlling a semiconductor manufacturing apparatus and a therefor | Hiroyuki Kitsunai, Akira Kagoshima, Daisuke Shiraishi, Hideyuki Yamamoto, Shoji Ikuhara +1 more | 2004-03-16 |