Issued Patents All Time
Showing 176–200 of 254 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7601240 | Disturbance-free, recipe-controlled plasma processing system and method | Akira Kagoshima, Hideyuki Yamamoto, Shoji Ikuhara, Toshio Masuda, Hiroyuki Kitsunai +2 more | 2009-10-13 |
| 7583376 | Method and device for examination of nonuniformity defects of patterns | Noboru Yamaguchi | 2009-09-01 |
| D588097 | Amplifier | — | 2009-03-10 |
| 7473332 | Method for processing semiconductor | Hiroyuki Kitsunai, Hideyuki Yamamoto, Akira Kagoshima, Daisuke Shiraishi | 2009-01-06 |
| D581904 | Loudspeaker | — | 2008-12-02 |
| 7460747 | Waveguide and optical cable module | Hirokatsu Nakayama, Naru Yasuda, Hayami Hosokawa | 2008-12-02 |
| D580407 | Amplifier | — | 2008-11-11 |
| D578519 | Loudspeaker frame | Koji Nakane, Hiroki Akaishi | 2008-10-14 |
| D573980 | Loudspeaker | Koji Nakane, Hiroki Akaishi | 2008-07-29 |
| 7396771 | Plasma etching apparatus and plasma etching method | Go Miya, Seiichiro Kanno, Naoshi Itabashi, Motohiko Yoshigai, Masahito Mori +2 more | 2008-07-08 |
| 7376479 | Process monitoring device for sample processing apparatus and control method of sample processing apparatus | Hiroyuki Kitsunai, Hideyuki Yamamoto, Shoji Ikuhara, Kazue Takahashi | 2008-05-20 |
| D567231 | Loudspeaker frame | Koji Nakane, Hiroki Akaishi | 2008-04-22 |
| D567225 | Loudspeaker | Koji Nakane, Hiroki Akaishi | 2008-04-22 |
| 7343217 | System for monitoring and controlling a semiconductor manufacturing apparatus using prediction model equation | Hiroyuki Kitsunai, Akira Kagoshima, Daisuke Shiraishi, Hideyuki Yamamoto, Shoji Ikuhara +1 more | 2008-03-11 |
| 7304744 | Apparatus and method for measuring the thickness of a thin film via the intensity of reflected light | Masatsugu Hatanaka, Toru Tanigawa, Yasunobu Tagusa | 2007-12-04 |
| D555117 | Television receiver | Hironori Ohishi | 2007-11-13 |
| 7158848 | Process monitoring device for sample processing apparatus and control method of sample processing apparatus | Hiroyuki Kitsunai, Hideyuki Yamamoto, Shoji Ikuhara, Kazue Takahashi | 2007-01-02 |
| 7147748 | Plasma processing method | Go Miya, Hiroyuki Kitsunai, Toshio Masuda, Hideyuki Yamamoto | 2006-12-12 |
| 7147747 | Plasma processing apparatus and plasma processing method | Go Miya, Hiroyuki Kitsunai, Toshio Masuda, Hideyuki Yamamoto | 2006-12-12 |
| 7122096 | Method and apparatus for processing semiconductor | Hiroyuki Kitsunai, Hideyuki Yamamoto, Akira Kagoshima, Daisuke Shiraishi | 2006-10-17 |
| 7107115 | Method for controlling semiconductor processing apparatus | Hideyuki Yamamoto, Shoji Ikuhara, Akira Kagoshima | 2006-09-12 |
| 7062347 | Maintenance method and system for plasma processing apparatus | Hideyuki Yamamoto, Toshio Masuda, Shoji Ikuhara, Akira Kagoshima | 2006-06-13 |
| 7058467 | Process monitoring device for sample processing apparatus and control method of sample processing apparatus | Hiroyuki Kitsunai, Hideyuki Yamamoto, Shoji Ikuhara, Kazue Takahashi | 2006-06-06 |
| 7058470 | Method of monitoring and/or controlling a semiconductor manufacturing apparatus and a system therefor | Hiroyuki Kitsunai, Akira Kagoshima, Daisuke Shiraishi, Hideyuki Yamamoto, Shoji Ikuhara +1 more | 2006-06-06 |
| 7010374 | Method for controlling semiconductor processing apparatus | Hideyuki Yamamoto, Shoji Ikuhara, Akira Kagoshima | 2006-03-07 |