Issued Patents All Time
Showing 26–50 of 72 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8126258 | Method of detecting defects in patterns on semiconductor substrate by comparing second image with reference image after acquiring second image from first image and apparatus for performing the same | Yu-Sin Yang, Jong-An Kim, Moon-Shik Kang, Ji Hye Kim | 2012-02-28 |
| 8055056 | Method of detecting defects of patterns on a semiconductor substrate and apparatus for performing the same | Jong-An Kim, Yu-Sin Yang, Moon-Shik Kang, Ji Hye Kim | 2011-11-08 |
| 8050488 | Method of analyzing a wafer sample | Jong-An Kim, Yu-Sin Yang, Moon-Shik Kang, Ji Hye Kim | 2011-11-01 |
| 8034641 | Method for inspection of defects on a substrate | Woo-Seok Ko, Hyung-Su Son, Yu-Sin Yang | 2011-10-11 |
| 7747063 | Method and apparatus for inspecting a substrate | Jung-Taek Lim, Young-Jee Yoon, Sung-Hong Park | 2010-06-29 |
| 7728966 | Optical inspection tool having lens unit with multiple beam paths for detecting surface defects of a substrate and methods of using same | Jong-An Kim, Dong-Chun Lee, Ik-Chul Kim, Sang Hee Kim | 2010-06-01 |
| 7697130 | Apparatus and method for inspecting a surface of a wafer | Woo-Seok Ko, Yu-Sin Yang, Young-Jee Yoon | 2010-04-13 |
| 7666069 | Wafer holder and wafer conveyor equipped with the same | Tae Kyoung Kim, Yun-Jung Jee, Kyoung-Su Shin | 2010-02-23 |
| 7646478 | Apparatus and method for examining spectral characteristics of transmitted light through an object | Koung-Su Shin, Dong-Su Ha | 2010-01-12 |
| 7626164 | Method of scanning a substrate, and method and apparatus for analyzing crystal characteristics | Young-Jee Yoon, Jung-Taek Lim, Tae-Sung Kim, Sung-Hong Park | 2009-12-01 |
| 7573568 | Method and apparatus for detecting a photolithography processing error, and method and apparatus for monitoring a photolithography process | Yu-Sin Yang, Sang-Mun Chon, Sun-Yong Choi | 2009-08-11 |
| 7526959 | Method of inspecting a substrate using ultrasonic waves and apparatus for performing the same | Kwang Soo Kim | 2009-05-05 |
| 7486392 | Method of inspecting for defects and apparatus for performing the method | Yu-Sin Yang, Ki-Suk Chung, Tae-Sung Kim, Byung-Sug Lee | 2009-02-03 |
| 7446865 | Method of classifying defects | Ki-Suk Chung, Yu-Sin Yang, Byung-Sug Lee, Ji-Young Shin, Tae-Sung Kim | 2008-11-04 |
| 7433032 | Method and apparatus for inspecting defects in multiple regions with different parameters | Joung Soo Kim, Sang-Mun Chon, Yu-Sin Yang | 2008-10-07 |
| 7428328 | Method of forming a three-dimensional image of a pattern to be inspected and apparatus for performing the same | Yun-Jung Jee, Yu-Sin Yang, Tae Kyoung Kim | 2008-09-23 |
| 7426031 | Method and apparatus for inspecting target defects on a wafer | Moon-kyung Kim, Yu-Sin Yang | 2008-09-16 |
| 7405817 | Method and apparatus for classifying defects of an object | Pil-Sik Hyun, Sun-Yong Choi, Sang-Kil Lee, Sang Min Kim | 2008-07-29 |
| 7394279 | Method of measuring a surface voltage of an insulating layer | Mi-Sung Lee, Yu-Sin Yang, Byung-Sug Lee | 2008-07-01 |
| 7385689 | Method and apparatus for inspecting substrate pattern | Kye-Weon Kim, Ki-Suk Chung, Sang-Mun Chon, Seong Jin Kim, Byung-Sug Lee +1 more | 2008-06-10 |
| 7355729 | Apparatus and method for measuring a thickness of a substrate | Hwan-Shik Park, Sun-Yong Choi, Kye-Weon Kim | 2008-04-08 |
| 7310140 | Method and apparatus for inspecting a wafer surface | Tae-Min Eom, Yu-Sin Yang, Yun-Jung Jee, Joung Soo Kim, Moon-kyung Kim +2 more | 2007-12-18 |
| 7289661 | Apparatus and method for inspecting a substrate | Sun-Yong Choi, Kwang Soo Kim, Joo-Woo Kim, Jeong Hyun Choi, Dong-Jin Park | 2007-10-30 |
| 7280233 | Method and apparatus for inspecting an edge exposure area of a wafer | Koung-Su Shin, Sun-Yong Choi, Dong-Chun Lee, Kwang-Jun Yoon | 2007-10-09 |
| 7274471 | Systems and methods for measuring distance of semiconductor patterns | Koung-Su Shin, Kwang-Jun Yoon, Sun-Yong Choi, Dong-Jin Park | 2007-09-25 |