Issued Patents All Time
Showing 51–72 of 72 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7271890 | Method and apparatus for inspecting defects | Joung Soo Kim, Yu-Sin Yang, Moon-kyung Kim, Sang-Mun Chon, Sun-Yong Choi | 2007-09-18 |
| 7220173 | Wafer holder and wafer conveyor system equipped with the same | Tae Kyoung Kim, Yun-Jung Jee, Kyoung-Su Shin | 2007-05-22 |
| 7197426 | Method and apparatus for measuring thickness of metal layer | Jang-Ik Park, Hwan-Shik Park | 2007-03-27 |
| 7186577 | Method for monitoring a density profile of impurities | Yun-Jung Jee, Sun-Yong Choi, Kwan-Woo Ryu | 2007-03-06 |
| 7186280 | Method of inspecting a leakage current characteristic of a dielectric layer and apparatus for performing the method | Tae-Min Eom, Yu-Sin Yang, Yun-Jung Jee | 2007-03-06 |
| 7113274 | Method and apparatus for inspecting a substrate | Yu-Sin Yang, Sang-Mun Chon, Sun-Yong Choi | 2006-09-26 |
| 7081952 | Method and apparatus for obtaining an image using a selective combination of wavelengths of light | Kye-Weon Kim, Hyun-Tae Kang | 2006-07-25 |
| 7046760 | Method of measuring and controlling concentration of dopants of a thin film | Tae Kyoung Kim, Sun-Yong Choi, Jeong Hyun Choi | 2006-05-16 |
| 7027638 | Wafer color variation correcting method, selective wafer defect detecting method, and computer readable recording media for the same | Sang-Mun Chon, Hyoung Jin Kim, Dong-Chun Lee, Sang-bong Choi, Sung-gon Ryu | 2006-04-11 |
| 6927077 | Method and apparatus for measuring contamination of a semiconductor substrate | Tae-Min Eom, Yu-Sin Yang, Kwan-Woo Ryu, Park-Song Kim, Sang-Mun Chon +1 more | 2005-08-09 |
| 6869215 | Method and apparatus for detecting contaminants in ion-implanted wafer | Yu-Sin Yang, Sang-Mun Chon, Sun-Yong Choi, Kwan-Woo Ryu, Park-Song Kim +1 more | 2005-03-22 |
| 6870948 | Method and apparatus for numerically analyzing grain growth on semiconductor wafer using SEM image | Sang-Mun Chon, Sang-bong Choi, Kye-Weon Kim, Sang Hoon Lee, Yu-Sin Yang +2 more | 2005-03-22 |
| 6850332 | Method for measuring step difference in a semiconductor device and apparatus for performing the same | Kye-Weon Kim, Yu-Sin Yang, Hyo-Hoo Kim | 2005-02-01 |
| 6815236 | Method of measuring a concentration of a material and method of measuring a concentration of a dopant of a semiconductor device | Tae Kyoung Kim, Sun-Yong Choi, Kwang Soo Kim, Koung-Su Shin, Jeong Hyun Choi +1 more | 2004-11-09 |
| 6803241 | Method of monitoring contact hole of integrated circuit using corona charges | Tae-Min Eom, Yu-Sin Yang | 2004-10-12 |
| 6800863 | Method for monitoring an ion implanter and ion implanter having a shadow jig for performing the same | Sun-Yong Choi, Dong-Chun Lee, Tae Kyoung Kim, Doo-Guen Song, Seung-Won Chae | 2004-10-05 |
| 6650408 | Method for inspecting a polishing pad in a semiconductor manufacturing process, an apparatus for performing the method, and a polishing device adopting the apparatus | Kye-Weon Kim, Yu-Sin Yang, Hyo-Hoo Kim | 2003-11-18 |
| 6544802 | Wafer inspection system and method for selectively inspecting conductive pattern defects | Pil-Sik Hyun | 2003-04-08 |
| 6528333 | Method of and device for detecting micro-scratches | Sang-Mun Chon, Sang-bong Choi, Hyung-Suk Cho, Pil-Sik Hyun, Kyu-Hong Lim +1 more | 2003-03-04 |
| 6515293 | Method and apparatus for detecting thickness of thin layer formed on a wafer | Sang-Mun Chon, Sang-bong Choi, Hyun Suk Cho, Pil-Sik Hyun | 2003-02-04 |
| 6449037 | Method of and device for detecting micro-scratches | Sang-Mun Chon, Sang-bong Choi, Hyung-Suk Cho, Pil-Sik Hyun, Kyu-Hong Lim +1 more | 2002-09-10 |
| 6366688 | Apparatus and method for contact failure inspection in semiconductor devices | Jeong-kon Kim, Sang-moon Chon, Sang-bong Choi | 2002-04-02 |