Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7112810 | Ion implanting apparatus and ion implanting method using the same | Gyeong-Su Keum, Seung-Ki Chae, Hyung-Sik Hong, Sang Yeob Cha, Jae Hyun Han +3 more | 2006-09-26 |
| 6867055 | Method of testing ion implantation energy in ion implantation equipment | — | 2005-03-15 |
| 6800863 | Method for monitoring an ion implanter and ion implanter having a shadow jig for performing the same | Chung-Sam Jun, Sun-Yong Choi, Dong-Chun Lee, Tae Kyoung Kim, Seung-Won Chae | 2004-10-05 |