Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7405817 | Method and apparatus for classifying defects of an object | Sun-Yong Choi, Sang-Kil Lee, Chung-Sam Jun, Sang Min Kim | 2008-07-29 |
| 6912056 | Apparatus and method for measuring each thickness of a multilayer stacked on a substrate | Sun-Jin Kang, Sang-Kil Lee, Kyung-Ho Jung | 2005-06-28 |
| 6544802 | Wafer inspection system and method for selectively inspecting conductive pattern defects | Chung-Sam Jun | 2003-04-08 |
| 6528333 | Method of and device for detecting micro-scratches | Chung-Sam Jun, Sang-Mun Chon, Sang-bong Choi, Hyung-Suk Cho, Kyu-Hong Lim +1 more | 2003-03-04 |
| 6515293 | Method and apparatus for detecting thickness of thin layer formed on a wafer | Chung-Sam Jun, Sang-Mun Chon, Sang-bong Choi, Hyun Suk Cho | 2003-02-04 |
| 6449037 | Method of and device for detecting micro-scratches | Chung-Sam Jun, Sang-Mun Chon, Sang-bong Choi, Hyung-Suk Cho, Kyu-Hong Lim +1 more | 2002-09-10 |