Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7289661 | Apparatus and method for inspecting a substrate | Chung-Sam Jun, Sun-Yong Choi, Kwang Soo Kim, Jeong Hyun Choi, Dong-Jin Park | 2007-10-30 |
| 7235411 | Method for aligning a wafer and apparatus for performing the same | Kyu-Hong Lim, Byung-Am Lee, Chang-Hoon Lee | 2007-06-26 |
| 7155366 | Apparatus and method for inspecting patterns on wafers | Chang-Hoon Lee, Byung-Am Lee, Byung-Seol Ahn, Jae-Sun Cho, Sung-Man Lee | 2006-12-26 |