Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7339663 | Method and apparatus for classifying repetitive defects on a substrate | Young-Kyu Lim, Byung-Seol Ahn, Jae-Sun Cho, Chang-Hoon Lee, Jung-Lan Lee +1 more | 2008-03-04 |
| 7235411 | Method for aligning a wafer and apparatus for performing the same | Kyu-Hong Lim, Joo-Woo Kim, Chang-Hoon Lee | 2007-06-26 |
| 7205543 | Auto focusing apparatus and method | Yong-Wan Kim, Sang-Kil Lee, Jin Woo Lee, Hyo Sang Cho | 2007-04-17 |
| 7155366 | Apparatus and method for inspecting patterns on wafers | Chang-Hoon Lee, Byung-Seol Ahn, Jae-Sun Cho, Joo-Woo Kim, Sung-Man Lee | 2006-12-26 |
| 6528333 | Method of and device for detecting micro-scratches | Chung-Sam Jun, Sang-Mun Chon, Sang-bong Choi, Hyung-Suk Cho, Pil-Sik Hyun +1 more | 2003-03-04 |
| 6449037 | Method of and device for detecting micro-scratches | Chung-Sam Jun, Sang-Mun Chon, Sang-bong Choi, Hyung-Suk Cho, Pil-Sik Hyun +1 more | 2002-09-10 |
| 5953579 | In-line test of contact opening of semiconductor device | Sang-Kil Lee, Kyoung-mo Yang | 1999-09-14 |