Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7339663 | Method and apparatus for classifying repetitive defects on a substrate | Young-Kyu Lim, Byung-Am Lee, Jae-Sun Cho, Chang-Hoon Lee, Jung-Lan Lee +1 more | 2008-03-04 |
| 7155366 | Apparatus and method for inspecting patterns on wafers | Chang-Hoon Lee, Byung-Am Lee, Jae-Sun Cho, Joo-Woo Kim, Sung-Man Lee | 2006-12-26 |
| 6043502 | Apparatus and method for sensing an insertion state of a wafer in a cassette | — | 2000-03-28 |
| 5746832 | Apparatus for depositing particles onto a wafer | Seung-Ki Chae, Sang-kyu Hahm, Jong Soo Kim | 1998-05-05 |
| 5654205 | Apparatus and method for depositing particles onto a wafer | Seung-Ki Chae, Sang-kyu Hahm, Jong Soo Kim | 1997-08-05 |