Issued Patents All Time
Showing 51–75 of 86 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8181522 | Capacitive acceleration sensor having a movable mass and a spring element | Roland Scheuerer | 2012-05-22 |
| 8138006 | Method for producing a micromechanical component having a trench structure for backside contact | Roland Scheuerer, Eckhard Graf | 2012-03-20 |
| 8123963 | Method for producing a semiconductor component and a semiconductor component produced according to the method | Hubert Benzel, Hans Artmann, Frank Schaefer | 2012-02-28 |
| 7863072 | Micromechanical diaphragm sensor having a double diaphragm | Matthias Illing, Christoph Schelling, Heiko Stahl, Stefan Weiss | 2011-01-04 |
| 7833405 | Micromechanical component and corresponding production method | Hubert Benzel, Hans Artmann, Frank Schaeffer | 2010-11-16 |
| 7834452 | Device made of single-crystal silicon | Arnd Kaelberer, Helmut Baumann, Roland Scheuerer | 2010-11-16 |
| 7705413 | Micromechanical component and method for producing a micromechanical component | Ralf Hausner | 2010-04-27 |
| 7679154 | Method for manufacturing a semiconductor component and a semiconductor component, in particular a diaphragm sensor | Hubert Benzel, Hans Artmann, Thorsten Pannek, Frank Schäfer | 2010-03-16 |
| 7479232 | Method for producing a semiconductor component and a semiconductor component produced according to the method | Hubert Benzel, Hans Artmann, Frank Schaefer | 2009-01-20 |
| 7479234 | Method for producing cavities having optically transparent wall | Hubert Benzel, Frank Schaefer | 2009-01-20 |
| 7453254 | Microstructured chemical sensor | Doris Schielein, Christian Krummel, Christoph Schelling | 2008-11-18 |
| 7435691 | Micromechanical component and suitable method for its manufacture | — | 2008-10-14 |
| 7419581 | Method for producing optically transparent regions in a silicon substrate | Hubert Benzel, Hans Artmann, Frank Schaefer | 2008-09-02 |
| 7343806 | Pressure sensor featuring pressure loading of the fastening element | Joerg Muchow, Hubert Benzel, Frank Schaefer | 2008-03-18 |
| 7306966 | Method for producing a semiconductor component and a semiconductor component, especially a membrane sensor | Hubert Benzel, Hans Artmann, Thorsten Pannek, Frank Schäfer | 2007-12-11 |
| 7300854 | Method for producing a semiconductor component having a movable mass in particular, and semiconductor component produced according to this method | Hubert Benzel, Frank Schaefer | 2007-11-27 |
| 7279759 | Membrane sensor | Roland Muller-Fiedler, Hans Hecht, Joerg Muchow, Matthias Fuertsch, Andreas Stratmann +6 more | 2007-10-09 |
| 7193290 | Semiconductor component and a method for producing the same | Hubert Benzel, Frank Schaefer | 2007-03-20 |
| 7160750 | Method of producing a semiconductor sensor component | Hubert Benzel, Frank Schaefer | 2007-01-09 |
| 7148077 | Micromechanical structural element having a diaphragm and method for producing such a structural element | Matthias Fuertsch, Stefan Pinter, Frank Fischer, Lars Metzger, Christoph Schelling +1 more | 2006-12-12 |
| 7045382 | Method for producing micromechanic sensors and sensors produced by said method | Hubert Benzel, Hans Artmann, Frank Schaefer | 2006-05-16 |
| 7037438 | Method for production of a semiconductor component and a semiconductor component produced by said method | Hubert Benzel, Hans Artmann, Frank Schaefer | 2006-05-02 |
| 6906392 | Micromechanical component | Hubert Benzel, Michael Bauer, Hans Artmann, Thorsten Pannek, Frank Schaefer +1 more | 2005-06-14 |
| 6840111 | Micromechanical component and pressure sensor having a component of this type | Hubert Benzel, Frank Schaefer | 2005-01-11 |
| 6832523 | Micromechanical component and manufacturing method | Hubert Benzel, Frank Schaefer | 2004-12-21 |