Issued Patents All Time
Showing 76–86 of 86 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6820481 | Mass flow sensor having an improved membrane stability | Werner Steiner | 2004-11-23 |
| 6803637 | Micromechanical component with different doping types so that one type is anodized into porous silicon | Hubert Benzel, Hans Artmann, Frank Schaefer | 2004-10-12 |
| 6565765 | Method for manufacturing a sensor having a membrane | — | 2003-05-20 |
| 6523403 | Mass flow sensor | Matthias Fuertsch | 2003-02-25 |
| 6365055 | Process for producing a sensor membrane substrate | Steffen Schmidt | 2002-04-02 |
| 6336360 | Device for measuring the mass of a medium flowing in a line | — | 2002-01-08 |
| 6303990 | Conductor path contacting arrangement and method | — | 2001-10-16 |
| 6240777 | Sensor having a membrane | Christoph Treutler, Herbert Goebel, Wolfgang Mueller, Steffen Schmidt, Klaus Heyers +2 more | 2001-06-05 |
| 5905203 | Micromechanical acceleration sensor | Georg Flach, Udo Nothelfer, Gunther Schuster | 1999-05-18 |
| 5109890 | Loom sley drive | Angelo Stacher | 1992-05-05 |
| 4906935 | Method and equipment for vacuum monitoring in vacuum switching tubes | Ruediger Hess, Wilfried Kuhl, Leonhard Klug, Wolfgang Schilling, Peter Trentin +2 more | 1990-03-06 |