Issued Patents All Time
Showing 51–75 of 113 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7785486 | Method of etching structures into an etching body using a plasma | Andrea Urban, Klaus Breitschwerdt, Volker Becker | 2010-08-31 |
| 7709933 | Structural element having a porous region at least regionally provided with a cover layer and its use as well as method for setting the thermal conductivity of a porous region | Hans Artmann, Thorsten Pannek, Hans-Peter Trah | 2010-05-04 |
| 7648611 | Plasma etching equipment | Andrea Schilp | 2010-01-19 |
| 7642545 | Layer and system with a silicon layer and a passivation layer, method for production of a passivation layer on a silicon layer and use thereof | Andrea Urban, Klaus Breitschwerdt | 2010-01-05 |
| 7582514 | Microelectromechanical systems encapsulation process with anti-stiction coating | Cyril Vancura, Markus Ulm, Brian Stark, Matthias Metz, Tino Fuchs +1 more | 2009-09-01 |
| 7563633 | Microelectromechanical systems encapsulation process | Markus Ulm, Brian Stark, Matthias Metz, Tino Fuchs, Silvia Kronmueller | 2009-07-21 |
| 7531229 | Microstructured component and method for its manufacture | Udo-Martin Gomez | 2009-05-12 |
| 7398588 | SOI component comprising margins for separation | Oliver Stoll, Gilbert Moersch, Gottfried Flik, Klaus Kuettner | 2008-07-15 |
| 7361287 | Method for etching structures in an etching body by means of a plasma | — | 2008-04-22 |
| 7321156 | Device for capacitive pressure measurement and method for manufacturing a capacitive pressure measuring device | Frank Fischer, Hans-Peter Trah, Lars Metzger | 2008-01-22 |
| 7312553 | Micromechanical component and method for producing same | — | 2007-12-25 |
| 7288485 | Device and method for anisotropic plasma etching of a substrate, particularly a silicon element | Klaus Breitschwerdt, Bernd Kutsch | 2007-10-30 |
| 7285228 | Device and method for anisotropic plasma etching of a substrate, a silicon body in particular | Klaus Breitschwerdt, Bernd Kutsch | 2007-10-23 |
| 7201852 | Method for removing defects from silicon bodies by a selective etching process | Richard Spitz, Helga Uebbing, Doerte Eimers-Klose, Andrea Schilp | 2007-04-10 |
| 7166536 | Methods for plasma etching of silicon | Andrea Schilp, Bernhard Elsner | 2007-01-23 |
| 7149070 | Holding device, in particular for fixing a semiconductor wafer in a plasma etching device, and method for supplying heat to or dissipating heat from a substrate | Klaus Breitschwerdt, Andrea Urban | 2006-12-12 |
| 7094706 | Device and method for etching a substrate by using an inductively coupled plasma | Klaus Breitschwerdt, Volker Becker, Andrea Schilp | 2006-08-22 |
| 7052623 | Method for processing silicon using etching processes | Volker Becker, Andrea Schilp | 2006-05-30 |
| 6974709 | Method and device for providing a semiconductor etching end point and for detecting the end point | Klaus Breitschwerdt | 2005-12-13 |
| 6960536 | Method for producing integrated microsystems | Wilhelm Frey, Christoph Duenn | 2005-11-01 |
| 6926844 | Plasma etching method having pulsed substrate electrode power | Andrea Schilp | 2005-08-09 |
| 6911348 | Device and method for determining the lateral undercut of a structured surface layer | Volker Becker, Andrea Schilp | 2005-06-28 |
| 6899817 | Device and method for etching a substrate using an inductively coupled plasma | Volker Becker, Andrea Schilp | 2005-05-31 |
| 6874511 | Method of avoiding or eliminating deposits in the exhaust area of a vacuum system | Bernd Kutsch | 2005-04-05 |
| 6726815 | Electrochemical etching cell | Hans Artmann, Wilhelm Frey | 2004-04-27 |