Issued Patents All Time
Showing 101–113 of 113 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6062082 | Micromechanical acceleration or coriolis rotation-rate sensor | Gero Guenther, Karsten Funk, Andrea Schilp | 2000-05-16 |
| 6030850 | Method for manufacturing a sensor | Juergen Kurle, Karsten Funk, Michael Offenberg, Andrea Schilp | 2000-02-29 |
| 6012341 | Force sensor having an adjustable distance between an operating point and a point of mechanical instability | Karsten Funk, Hans-Martin Kulcke, Werner Uhler, Andrea Schilp | 2000-01-11 |
| 6008138 | Process for making micromechanical structures | Andrea Schilp | 1999-12-28 |
| 5996409 | Acceleration sensing device | Karsten Funk, Bernhard Elsner, Wilhelm Frey | 1999-12-07 |
| 5804457 | Method for manufacturing a force sensor | Gerhard Benz, Andrea Schilp, Erich Zabler, Jurgen Schirmer, Werner Uhler | 1998-09-08 |
| 5756901 | Sensor and method for manufacturing a sensor | Juergen Kurle, Karsten Funk, Michael Offenberg, Andrea Schilp | 1998-05-26 |
| 5616523 | Method of manufacturing sensor | Gerhard Benz, Jiri Marek, Frank Bantien, Horst Muenzel, Michael Offenberg +1 more | 1997-04-01 |
| 5595940 | Method of producing micromechanical structures | Hans-Peter Trah, Andrea Schilp | 1997-01-21 |
| 5553506 | Force sensor and a method for manufacturing a force sensor | Gerhard Benz, Andrea Schilp, Erich Zabler, Jurgen Schirmer, Werner Uhler | 1996-09-10 |
| 5542558 | Method for manufacturing micro-mechanical components using selective anodization of silicon | Gerhard Benz, Jiri Marek, Martin Willmann, Frank Bantien, Horst Muenzel +2 more | 1996-08-06 |
| 5501893 | Method of anisotropically etching silicon | Andrea Schilp | 1996-03-26 |
| 5498312 | Method for anisotropic plasma etching of substrates | Andrea Schilp | 1996-03-12 |