Issued Patents All Time
Showing 101–125 of 189 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6429146 | Wafer planarization using a uniform layer of material and method and apparatus for forming uniform layer of material used in semiconductor processing | Hugh E. Stroupe, Brian F. Gordon | 2002-08-06 |
| 6426287 | Method for forming a semiconductor connection with a top surface having an enlarged recess | Kirk D. Prall, Fernando Gonzalez | 2002-07-30 |
| 6420786 | Conductive spacer in a via | Fernando Gonzalez | 2002-07-16 |
| 6420268 | Methods of forming materials within openings, and methods of forming isolation regions | John T. Moore | 2002-07-16 |
| 6413875 | Process and apparatus for improving the performance of a temperature-sensitive etch process | Bradley J. Howard | 2002-07-02 |
| 6410459 | Wafer planarization using a uniform layer of material and method and apparatus for forming uniform layer of material used in semiconductor processing | Hugh E. Stroupe, Brian F. Gordon | 2002-06-25 |
| 6400029 | Self-limiting method of reducing contamination in a contact opening, method of making contacts and semiconductor devices therewith, and resulting structures | Bradley J. Howard | 2002-06-04 |
| 6391710 | Methods of forming capacitors | John T. Moore, Scott DeBoer | 2002-05-21 |
| 6387717 | Field emission tips and methods for fabricating the same | Sanh D. Tang, Zhaohui Huang | 2002-05-14 |
| 6387816 | Method and apparatus for controlling the temperature of a gas distribution plate in a process reactor | Kevin G. Donohoe | 2002-05-14 |
| 6384001 | Dilute cleaning composition | Max Hineman | 2002-05-07 |
| 6383334 | Method and apparatus for controlling the temperature of a gas distribution plate in a process reactor | Kevin G. Donohoe | 2002-05-07 |
| 6355566 | Method of removing surface defects or other recesses during the formation of a semiconductor device | Bradley J. Howard, Mark E. Jost | 2002-03-12 |
| RE37505 | Stacked capacitor construction | Phillip G. Wald | 2002-01-15 |
| 6337244 | Method of forming flash memory | Kirk D. Prall | 2002-01-08 |
| 6333556 | Insulating materials | Werner Juengling, Kirk D. Prall, Ravi Iyer, Gurtej S. Sandhu | 2001-12-25 |
| 6331488 | Planarization process for semiconductor substrates | Trung T. Doan, Mark Durcan, Scott Meikle | 2001-12-18 |
| 6323133 | Method and apparatus for controlling the temperature of a gas distribution plate in a process reactor | Kevin G. Donohoe | 2001-11-27 |
| 6316363 | Deadhesion method and mechanism for wafer processing | Hugh E. Stroupe, Brian F. Gordon | 2001-11-13 |
| 6313046 | Method of forming materials between conductive electrical components, and insulating materials | Werner Juengling, Kirk D. Prall, Ravi Iyer, Gurtej S. Sandhu | 2001-11-06 |
| 6313048 | Dilute cleaning composition and method for using same | Max Hineman | 2001-11-06 |
| 6299725 | Method and apparatus for controlling the temperature of a gas distribution plate in a process reactor | Kevin G. Donohoe | 2001-10-09 |
| 6287978 | Method of etching a substrate | David S. Becker, Fred L. Roe | 2001-09-11 |
| 6277759 | Plasma etching methods | David S. Becker, Kevin G. Donohoe | 2001-08-21 |
| 6277731 | Method for forming a semiconductor connection with a top surface having an enlarged recess | Fernando Gonzalez, Kirk D. Prall | 2001-08-21 |