Issued Patents All Time
Showing 25 most recent of 130 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8557132 | Inline monitoring of pad loading for CuCMP and developing an endpoint technique for cleaning | Dinesh Chopra | 2013-10-15 |
| 8106438 | Stud capacitor device and fabrication method | Guy T. Blalock | 2012-01-31 |
| 8048287 | Method for selectively removing conductive material from a microelectronic substrate | Whonchee Lee, Scott E. Moore | 2011-11-01 |
| 8048756 | Method for removing metal layers formed outside an aperture of a BPSG layer utilizing multiple etching processes including electrochemical-mechanical polishing | Whonchee Lee, Guy T. Blalock | 2011-11-01 |
| 7972485 | Methods and apparatus for electromechanically and/or electrochemically-mechanically removing conductive material from a microelectronic substrate | Whonchee Lee, Scott E. Moore | 2011-07-05 |
| 7838381 | Stud capacitor device and fabrication method | Guy T. Blalock | 2010-11-23 |
| 7700436 | Method for forming a microelectronic structure having a conductive material and a fill material with a hardness of 0.04 GPA or higher within an aperture | Whonchee Lee, Guy T. Blalock | 2010-04-20 |
| 7618528 | Methods and apparatus for electromechanically and/or electrochemically-mechanically removing conductive material from a microelectronic substrate | Whonchee Lee, Scott E. Moore | 2009-11-17 |
| 7604729 | Methods and apparatus for selectively removing conductive material from a microelectronic substrate | Whonchee Lee, Scott E. Moore | 2009-10-20 |
| 7588677 | Methods and apparatus for electrical, mechanical and/or chemical removal of conductive material from a microelectronic substrate | Whonchee Lee, Scott E. Moore, Trung T. Doan | 2009-09-15 |
| 7560017 | Methods and apparatus for electrically detecting characteristics of a microelectronic substrate and/or polishing medium | Whonchee Lee, Scott E. Moore | 2009-07-14 |
| 7538880 | Turbidity monitoring methods, apparatuses, and sensors | Scott E. Moore, Magdel Crum | 2009-05-26 |
| 7530877 | Semiconductor processor systems, a system configured to provide a semiconductor workpiece process fluid | Scott E. Moore, Magdel Crum | 2009-05-12 |
| 7374476 | Method and apparatus for forming a planarizing pad having a film and texture elements for planarization of microelectronic substrates | — | 2008-05-20 |
| 7367871 | Semiconductor processing methods of removing conductive material | Trung T. Doan | 2008-05-06 |
| 7276446 | Planarizing solutions, planarizing machines and methods for mechanical or chemical-mechanical planarization of microelectronic-device substrate assemblies | Karl M. Robinson | 2007-10-02 |
| 7220166 | Methods and apparatus for electromechanically and/or electrochemically-mechanically removing conductive material from a microelectronic substrate | Whonchee Lee, Scott E. Moore | 2007-05-22 |
| 7192335 | Method and apparatus for chemically, mechanically, and/or electrolytically removing material from microelectronic substrates | Whonchee Lee | 2007-03-20 |
| 7180591 | Semiconductor processors, sensors, semiconductor processing systems, semiconductor workpiece processing methods, and turbidity monitoring methods | Scott E. Moore, Magdel Crum | 2007-02-20 |
| 7160176 | Methods and apparatus for electrically and/or chemically-mechanically removing conductive material from a microelectronic substrate | Whonchee Lee, Scott E. Moore | 2007-01-09 |
| 7153410 | Methods and apparatus for electrochemical-mechanical processing of microelectronic workpieces | Scott E. Moore, Whonchee Lee, Trung T. Doan | 2006-12-26 |
| 7153195 | Methods and apparatus for selectively removing conductive material from a microelectronic substrate | Whonchee Lee, Scott E. Moore | 2006-12-26 |
| 7151056 | Method and apparatus for forming a planarizing pad having a film and texture elements for planarization of microelectronic substrates | — | 2006-12-19 |
| 7134934 | Methods and apparatus for electrically detecting characteristics of a microelectronic substrate and/or polishing medium | Whonchee Lee, Scott E. Moore | 2006-11-14 |
| 7118445 | Semiconductor workpiece processing methods, a method of preparing semiconductor workpiece process fluid, and a method of delivering semiconductor workpiece process fluid to a semiconductor processor | Scott E. Moore, Magdel Crum | 2006-10-10 |