Issued Patents All Time
Showing 26–50 of 130 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7118447 | Semiconductor workpiece processing methods | Scott E. Moore, Magdel Crum | 2006-10-10 |
| 7118445 | Semiconductor workpiece processing methods, a method of preparing semiconductor workpiece process fluid, and a method of delivering semiconductor workpiece process fluid to a semiconductor processor | Scott E. Moore, Magdel Crum | 2006-10-10 |
| 7112121 | Methods and apparatus for electrical, mechanical and/or chemical removal of conductive material from a microelectronic substrate | Whonchee Lee, Scott E. Moore, Trung T. Doan | 2006-09-26 |
| 7094131 | Microelectronic substrate having conductive material with blunt cornered apertures, and associated methods for removing conductive material | Whonchee Lee, Scott E. Moore | 2006-08-22 |
| 7078308 | Method and apparatus for removing adjacent conductive and nonconductive materials of a microelectronic substrate | Whonchee Lee, Guy T. Blalock | 2006-07-18 |
| 7056194 | Semiconductor processing methods of removing conductive material | Trung T. Doan | 2006-06-06 |
| 6964602 | Methods and apparatuses for mechanical and chemical-mechanical planarization of microelectronic-device substrate assemblies on planarizing pads | Dinesh Chopra | 2005-11-15 |
| 6913997 | Method of using tantalum-aluminum-nitrogen material as diffusion barrier and adhesion layer in semiconductor devices | Salman Akram | 2005-07-05 |
| 6911111 | Inline monitoring of pad loading for CuCMP and developing an endpoint technique for cleaning | Dinesh Chopra | 2005-06-28 |
| 6890591 | Polishing pads and planarizing machines for mechanical or chemical-mechanical planarization of microelectronic-device substrate assemblies, and methods for making and using such pads and machines | Vishnu K. Agarwal | 2005-05-10 |
| 6867448 | Electro-mechanically polished structure | Whonchee Lee | 2005-03-15 |
| 6838382 | Method and apparatus for forming a planarizing pad having a film and texture elements for planarization of microelectronic substrates | — | 2005-01-04 |
| 6805615 | Planarizing solutions, planarizing machines and methods for mechanical or chemical-mechanical planarization of microelectronic-device substrate assemblies | Karl M. Robinson | 2004-10-19 |
| 6790130 | Semiconductor processing methods of removing conductive material | Trung T. Doan | 2004-09-14 |
| 6746316 | Methods and apparatuses for mechanical and chemical-mechanical planarization of microelectronic-device substrate assemblies on planarizing pads | Dinesh Chopra | 2004-06-08 |
| 6743724 | Planarization process for semiconductor substrates | Trung T. Doan, Guy T. Blalock, Mark Durcan | 2004-06-01 |
| 6736926 | Inline monitoring of pad loading for CuCMP and developing an endpoint technique for cleaning | Dinesh Chopra | 2004-05-18 |
| 6730954 | Method of depositing tungsten nitride using a source gas comprising silicon | Trung T. Doan | 2004-05-04 |
| 6716090 | Methods and apparatuses for mechanical and chemical-mechanical planarization of microelectronic-device substrate assemblies on planarizing pads | Dinesh Chopra | 2004-04-06 |
| 6712676 | Methods and apparatuses for mechanical and chemical-mechanical planarization of microelectronic-device substrate assemblies on planarizing pads | Dinesh Chopra | 2004-03-30 |
| 6709317 | Method and apparatus for uniformly planarizing a microelectronic substrate | Stephen J. Kramer | 2004-03-23 |
| 6690077 | Antireflective coating and field emission display device, semiconductor device and wiring line comprising same | Everett A. McTeer, Russell C. Zahorik | 2004-02-10 |
| 6672946 | Methods and apparatuses for mechanical and chemical-mechanical planarization of microelectronic-device substrate assemblies on planarizing pads | Dinesh Chopra | 2004-01-06 |
| 6652363 | Method and apparatus for uniformly planarizing a microelectronic substrate | Stephen J. Kramer | 2003-11-25 |
| 6652364 | Methods and apparatuses for mechanical and chemical-mechanical planarization of microelectronic-device substrate assemblies on planarizing pads | Dinesh Chopra | 2003-11-25 |