Issued Patents All Time
Showing 25 most recent of 77 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9593431 | Electroplating systems | Suresh Ramarajan | 2017-03-14 |
| 9040424 | Methods of forming single crystal silicon structures and semiconductor device structures including single crystal silicon structures | Janos Fucsko, David H. Wells, Patrick M. Flynn | 2015-05-26 |
| 8974655 | Methods of planarization and electro-chemical mechanical polishing processes | Wayne H. Huang | 2015-03-10 |
| 8603319 | Methods and systems for removing materials from microfeature workpieces with organic and/or non-aqueous electrolytic media | Gundu M. Sabde | 2013-12-10 |
| 8450214 | Methods of etching single crystal silicon | Janos Fucsko, David H. Wells | 2013-05-28 |
| 8419906 | Electroplating systems | Suresh Ramarajan | 2013-04-16 |
| 8294246 | Semiconductor structures including square cuts in single crystal silicon and method of forming same | Janos Fucsko, David H. Wells | 2012-10-23 |
| 8159050 | Single crystal silicon structures | Janos Fucsko, David H. Wells, Patrick M. Flynn | 2012-04-17 |
| 8101060 | Methods and apparatuses for electrochemical-mechanical polishing | — | 2012-01-24 |
| 8048287 | Method for selectively removing conductive material from a microelectronic substrate | Scott E. Moore, Scott Meikle | 2011-11-01 |
| 8048756 | Method for removing metal layers formed outside an aperture of a BPSG layer utilizing multiple etching processes including electrochemical-mechanical polishing | Scott Meikle, Guy T. Blalock | 2011-11-01 |
| 7977251 | High selectivity BPSG to TEOS etchant | Kevin J. Torek | 2011-07-12 |
| 7972485 | Methods and apparatus for electromechanically and/or electrochemically-mechanically removing conductive material from a microelectronic substrate | Scott E. Moore, Scott Meikle | 2011-07-05 |
| 7973388 | Semiconductor structures including square cuts in single crystal silicon | Janos Fucsko, David H. Wells | 2011-07-05 |
| 7708875 | Noncontact localized electrochemical deposition of metal thin films | Suresh Ramarajan | 2010-05-04 |
| 7709341 | Methods of shaping vertical single crystal silicon walls and resulting structures | Janos Fucsko, David H. Wells, Patrick M. Flynn | 2010-05-04 |
| 7700436 | Method for forming a microelectronic structure having a conductive material and a fill material with a hardness of 0.04 GPA or higher within an aperture | Scott Meikle, Guy T. Blalock | 2010-04-20 |
| 7670466 | Methods and apparatuses for electrochemical-mechanical polishing | — | 2010-03-02 |
| 7628932 | Wet etch suitable for creating square cuts in si | Janos Fucsko, David H. Wells | 2009-12-08 |
| 7618528 | Methods and apparatus for electromechanically and/or electrochemically-mechanically removing conductive material from a microelectronic substrate | Scott E. Moore, Scott Meikle | 2009-11-17 |
| 7604729 | Methods and apparatus for selectively removing conductive material from a microelectronic substrate | Scott E. Moore, Scott Meikle | 2009-10-20 |
| 7588677 | Methods and apparatus for electrical, mechanical and/or chemical removal of conductive material from a microelectronic substrate | Scott Meikle, Scott E. Moore, Trung T. Doan | 2009-09-15 |
| 7566391 | Methods and systems for removing materials from microfeature workpieces with organic and/or non-aqueous electrolytic media | Gundu M. Sabde | 2009-07-28 |
| 7560017 | Methods and apparatus for electrically detecting characteristics of a microelectronic substrate and/or polishing medium | Scott E. Moore, Scott Meikle | 2009-07-14 |
| 7524410 | Methods and apparatus for removing conductive material from a microelectronic substrate | Scott E. Moore, Brian A. Vaartstra | 2009-04-28 |