Issued Patents All Time
Showing 26–50 of 77 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7435324 | Noncontact localized electrochemical deposition of metal thin films | Suresh Ramarajan | 2008-10-14 |
| 7378353 | High selectivity BPSG to TEOS etchant | Kevin J. Torek | 2008-05-27 |
| 7256138 | Method and composition for selectively etching against cobalt silicide | Yongjun Jeff Hu | 2007-08-14 |
| 7220166 | Methods and apparatus for electromechanically and/or electrochemically-mechanically removing conductive material from a microelectronic substrate | Scott E. Moore, Scott Meikle | 2007-05-22 |
| 7192335 | Method and apparatus for chemically, mechanically, and/or electrolytically removing material from microelectronic substrates | Scott Meikle | 2007-03-20 |
| 7160176 | Methods and apparatus for electrically and/or chemically-mechanically removing conductive material from a microelectronic substrate | Scott Meikle, Scott E. Moore | 2007-01-09 |
| 7153195 | Methods and apparatus for selectively removing conductive material from a microelectronic substrate | Scott E. Moore, Scott Meikle | 2006-12-26 |
| 7153410 | Methods and apparatus for electrochemical-mechanical processing of microelectronic workpieces | Scott E. Moore, Scott Meikle, Trung T. Doan | 2006-12-26 |
| 7153777 | Methods and apparatuses for electrochemical-mechanical polishing | — | 2006-12-26 |
| 7138072 | Methods and apparatuses for planarizing microelectronic substrate assemblies | Gundu M. Sabde | 2006-11-21 |
| 7134934 | Methods and apparatus for electrically detecting characteristics of a microelectronic substrate and/or polishing medium | Scott E. Moore, Scott Meikle | 2006-11-14 |
| 7112121 | Methods and apparatus for electrical, mechanical and/or chemical removal of conductive material from a microelectronic substrate | Scott Meikle, Scott E. Moore, Trung T. Doan | 2006-09-26 |
| 7112122 | Methods and apparatus for removing conductive material from a microelectronic substrate | Scott E. Moore, Brian A. Vaartstra | 2006-09-26 |
| 7094131 | Microelectronic substrate having conductive material with blunt cornered apertures, and associated methods for removing conductive material | Scott Meikle, Scott E. Moore | 2006-08-22 |
| 7083700 | Methods and apparatuses for planarizing microelectronic substrate assemblies | Gundu M. Sabde | 2006-08-01 |
| 7078308 | Method and apparatus for removing adjacent conductive and nonconductive materials of a microelectronic substrate | Scott Meikle, Guy T. Blalock | 2006-07-18 |
| 6903018 | Methods and apparatuses for planarizing microelectronic substrate assemblies | Gundu M. Sabde | 2005-06-07 |
| 6881127 | Method and apparatuses for planarizing microelectronic substrate assemblies | Gundu M. Sabde | 2005-04-19 |
| 6867448 | Electro-mechanically polished structure | Scott Meikle | 2005-03-15 |
| 6825570 | Resistance-reducing conductive adhesives for attachment of electronic components | Tongbi Jiang | 2004-11-30 |
| 6783694 | Composition for selectively etching against cobalt silicide | Yongjun Jeff Hu | 2004-08-31 |
| 6759343 | Method and composition for selectively etching against cobalt silicide | Yongjun Jeff Hu | 2004-07-06 |
| 6693320 | Capacitor structures with recessed hemispherical grain silicon | Scott DeBoer | 2004-02-17 |
| 6660180 | Compositions for etching silicon with high selectivity to oxides and methods of using same | Pai-Hung Pan, Terry L. Gilton | 2003-12-09 |
| 6632719 | Capacitor structures with recessed hemispherical grain silicon | Scott DeBoer | 2003-10-14 |