Issued Patents All Time
Showing 76–77 of 77 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5716535 | Methods and etchants for etching oxides of silicon with low selectivity | Richard C. Hawthorne, Li Li, Pai-Hung Pan | 1998-02-10 |
| 5685951 | Methods and etchants for etching oxides of silicon with low selectivity in a vapor phase system | Kevin J. Torek, Richard C. Hawthorne | 1997-11-11 |