Issued Patents All Time
Showing 51–75 of 77 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6605539 | Electro-mechanical polishing of platinum container structure | Scott Meikle | 2003-08-12 |
| 6544435 | Composition and method of formation and use therefor in chemical-mechanical polishing | Karl M. Robinson | 2003-04-08 |
| 6541390 | Method and composition for selectively etching against cobalt silicide | Yongjun Jeff Hu | 2003-04-01 |
| 6533893 | Method and apparatus for chemical-mechanical planarization of microelectronic substrates with selected planarizing liquids | Gundu M. Sabde, James J. Hofmann, Michael J. Joslyn | 2003-03-18 |
| 6458624 | Resistance-reducing conductive adhesives for attachment of electronic components | Tongbi Jiang | 2002-10-01 |
| 6436831 | Methods of forming insulative plugs and oxide plug forming methods | Pai-Hung Pan | 2002-08-20 |
| 6409936 | Composition and method of formation and use therefor in chemical-mechanical polishing | Karl M. Robinson | 2002-06-25 |
| 6399504 | Methods and etchants for etching oxides of silicon with low selectivity | Richard C. Hawthorne, Li Li, Pai-Hung Pan | 2002-06-04 |
| 6391793 | Compositions for etching silicon with high selectivity to oxides and methods of using same | Pai-Hung Pan, Terry L. Gilton | 2002-05-21 |
| 6383934 | Method and apparatus for chemical-mechanical planarization of microelectronic substrates with selected planarizing liquids | Gundu M. Sabde, James J. Hofmann, Michael J. Joslyn | 2002-05-07 |
| 6346750 | Resistance-reducing conductive adhesives for attachment of electronic components | Tongbi Jiang | 2002-02-12 |
| 6232232 | High selectivity BPSG to TEOS etchant | Kevin J. Torek | 2001-05-15 |
| 6225232 | Semiconductor processing methods, and methods of forming capacitor constructions | — | 2001-05-01 |
| 6210489 | Methods and etchants for etching oxides of silicon with low selectivity | Richard C. Hawthorne, Li Li, Pai-Hung Pan | 2001-04-03 |
| 6200909 | Method for selective etching of antireflective coatings | Kevin J. Torek, Satish Bedge | 2001-03-13 |
| 6140245 | Semiconductor processing methods, and methods of forming capacitor constructions | — | 2000-10-31 |
| 6103637 | Method for selective etching of antireflective coatings | Kevin J. Torek, Satish Bedge | 2000-08-15 |
| 6093652 | Methods of forming insulative plugs, and oxide plug forming methods | Pai-Hung Pan | 2000-07-25 |
| 6087273 | Process for selectively etching silicon nitride in the presence of silicon oxide | Kevin J. Torek | 2000-07-11 |
| 6074960 | Method and composition for selectively etching against cobalt silicide | Yongjun Jeff Hu | 2000-06-13 |
| 6029680 | Method for in situ removal of particulate residues resulting from cleaning treatments | Richard C. Hawthorne | 2000-02-29 |
| 5990019 | Selective etching of oxides | Kevin J. Torek, Richard C. Hawthorne | 1999-11-23 |
| 5981401 | Method for selective etching of anitreflective coatings | Kevin J. Torek, Satish Bedge | 1999-11-09 |
| 5885903 | Process for selectively etching silicon nitride in the presence of silicon oxide | Kevin J. Torek | 1999-03-23 |
| 5770263 | Method for in situ removal of particulate residues resulting from hydrofluoric acid cleaning treatments | Richard C. Hawthorne | 1998-06-23 |