Issued Patents All Time
Showing 1–25 of 36 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8969217 | Methods of treating semiconductor substrates, methods of forming openings during semiconductor fabrication, and methods of removing particles from over semiconductor substrates | Janos Fucsko, Niraj Rana, Sandra Tagg, Robert J. Hanson, Donald L. Yates +3 more | 2015-03-03 |
| 8603319 | Methods and systems for removing materials from microfeature workpieces with organic and/or non-aqueous electrolytic media | Whonchee Lee | 2013-12-10 |
| 8492288 | Methods of treating semiconductor substrates, methods of forming openings during semiconductor fabrication, and methods of removing particles from over semiconductor substrates | Janos Fucsko, Niraj Rana, Sandra Tagg, Robert J. Hanson, Donald L. Yates +3 more | 2013-07-23 |
| 7988529 | Methods and tools for controlling the removal of material from microfeature workpieces | Nagasubramaniyan Chandrasekaran, Rajshree Kothari, James J. Hofmann | 2011-08-02 |
| 7625495 | Methods and apparatuses for monitoring and controlling mechanical or chemical-mechanical planarization of microelectronic substrate assemblies | Jim Hofmann, Stephen J. Kramer, Scott E. Moore | 2009-12-01 |
| 7566391 | Methods and systems for removing materials from microfeature workpieces with organic and/or non-aqueous electrolytic media | Whonchee Lee | 2009-07-28 |
| 7527545 | Methods and tools for controlling the removal of material from microfeature workpieces | Nagasubramaniyan Chandrasekaran, Rajshree Kothari, James J. Hofmann | 2009-05-05 |
| 7402094 | Fixed-abrasive chemical-mechanical planarization of titanium nitride | Dinesh Chopra | 2008-07-22 |
| 7261832 | Methods and apparatuses for monitoring and controlling mechanical or chemical-mechanical planarization of microelectronic substrate assemblies | Jim Hofmann, Stephen J. Kramer, Scott E. Moore | 2007-08-28 |
| 7138072 | Methods and apparatuses for planarizing microelectronic substrate assemblies | Whonchee Lee | 2006-11-21 |
| 7121926 | Methods for planarization of group VIII metal-containing surfaces using a fixed abrasive article | — | 2006-10-17 |
| 7083700 | Methods and apparatuses for planarizing microelectronic substrate assemblies | Whonchee Lee | 2006-08-01 |
| 6997781 | Fixed-abrasive chemical-mechanical planarization of titanium nitride | Dinesh Chopra | 2006-02-14 |
| 6903018 | Methods and apparatuses for planarizing microelectronic substrate assemblies | Whonchee Lee | 2005-06-07 |
| 6881127 | Method and apparatuses for planarizing microelectronic substrate assemblies | Whonchee Lee | 2005-04-19 |
| 6881129 | Fixed-abrasive chemical-mechanical planarization of titanium nitride | Dinesh Chopra | 2005-04-19 |
| 6858538 | Methods and apparatuses for monitoring and controlling mechanical or chemical-mechanical planarization of microelectronic substrate assemblies | Jim Hofmann, Stephen J. Kramer, Scott E. Moore | 2005-02-22 |
| 6720266 | Methods and apparatuses for monitoring and controlling mechanical or chemical-mechanical planarization of microelectronic substrate assemblies | Jim Hofmann, Stephen J. Kramer, Scott E. Moore | 2004-04-13 |
| 6699791 | Methods and apparatuses for monitoring and controlling mechanical or chemical-mechanical planarization of microelectronic substrate assemblies | Jim Hofmann, Stephen J. Kramer, Scott E. Moore | 2004-03-02 |
| 6682628 | Methods and apparatuses for monitoring and controlling mechanical or chemical-mechanical planarization of microelectronic substrate assemblies | James J. Hoffmann, Stephen J. Kramer, Michael J. Joslyn | 2004-01-27 |
| 6595833 | Method and apparatus for mechanical and chemical-mechanical planarization of microelectronic substrates with metal compound abrasives | Scott Meikle | 2003-07-22 |
| 6589101 | Method and apparatus for mechanical and chemical-mechanical planarization of microelectronic substrates with metal compound abrasives | Scott Meikle | 2003-07-08 |
| 6533893 | Method and apparatus for chemical-mechanical planarization of microelectronic substrates with selected planarizing liquids | James J. Hofmann, Michael J. Joslyn, Whonchee Lee | 2003-03-18 |
| 6492273 | Methods and apparatuses for monitoring and controlling mechanical or chemical-mechanical planarization of microelectronic substrate assemblies | Jim Hofmann, Stephen J. Kramer, Scott E. Moore | 2002-12-10 |
| 6485356 | Method and apparatus for mechanical and chemical-mechanical planarization of microelectronic substrates with metal compound abrasives | Scott Meikle | 2002-11-26 |