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Method of forming capacitors, and methods of utilizing silicon dioxide-containing masking structures |
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2012-05-22 |
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Methods of utilizing silicon dioxide-containing masking structures |
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2011-09-27 |
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Methods of forming capacitors |
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2011-02-22 |
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Methods and apparatuses for monitoring and controlling mechanical or chemical-mechanical planarization of microelectronic substrate assemblies |
Gundu M. Sabde, Stephen J. Kramer, Scott E. Moore |
2009-12-01 |
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Extended Kalman filter incorporating offline metrology |
— |
2008-02-12 |
| 7261832 |
Methods and apparatuses for monitoring and controlling mechanical or chemical-mechanical planarization of microelectronic substrate assemblies |
Gundu M. Sabde, Stephen J. Kramer, Scott E. Moore |
2007-08-28 |
| 7087527 |
Extended kalman filter incorporating offline metrology |
— |
2006-08-08 |
| 6858538 |
Methods and apparatuses for monitoring and controlling mechanical or chemical-mechanical planarization of microelectronic substrate assemblies |
Gundu M. Sabde, Stephen J. Kramer, Scott E. Moore |
2005-02-22 |
| 6720266 |
Methods and apparatuses for monitoring and controlling mechanical or chemical-mechanical planarization of microelectronic substrate assemblies |
Gundu M. Sabde, Stephen J. Kramer, Scott E. Moore |
2004-04-13 |
| 6699791 |
Methods and apparatuses for monitoring and controlling mechanical or chemical-mechanical planarization of microelectronic substrate assemblies |
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2004-03-02 |
| 6547640 |
Devices and methods for in-situ control of mechanical or chemical-mechanical planarization of microelectronic-device substrate assemblies |
— |
2003-04-15 |
| 6492273 |
Methods and apparatuses for monitoring and controlling mechanical or chemical-mechanical planarization of microelectronic substrate assemblies |
Gundu M. Sabde, Stephen J. Kramer, Scott E. Moore |
2002-12-10 |
| 6472325 |
Method and apparatuses for monitoring and controlling mechanical or chemical-mechanical planarization of microelectronic substrate assemblies |
Gundu M. Sabde, Stephen J. Kramer, Scott E. Moore |
2002-10-29 |
| 6468912 |
Methods and apparatuses for monitoring and controlling mechanical or chemical-mechanical planarization of microelectronic substrate assemblies |
Gundu M. Sabde, Stephen J. Kramer, Scott E. Moore |
2002-10-22 |
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Methods and apparatuses for monitoring and controlling mechanical or chemical-mechanical planarization of microelectronic substrate assemblies |
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2002-10-08 |
| 6290572 |
Devices and methods for in-situ control of mechanical or chemical-mechanical planarization of microelectronic-device substrate assemblies |
— |
2001-09-18 |
| 5785569 |
Method for manufacturing hollow spacers |
Darryl M. Stansbury, Charles M. Watkins |
1998-07-28 |
| 5588359 |
Method for forming a screen for screen printing a pattern of small closely spaced features onto a substrate |
Darryl M. Stansbury |
1996-12-31 |