| 11651952 |
Using sacrificial polymer materials in semiconductor processing |
Michael T. Andreas, Jerome A. Imonigie, Sanjeev Sapra, Ian K. McDaniel |
2023-05-16 |
$14,212,000 |
| 10916418 |
Using sacrificial polymer materials in semiconductor processing |
Michael T. Andreas, Jerome A. Imonigie, Sanjeev Sapra, Ian K. McDaniel |
2021-02-09 |
$22,943,000 |
| 10607851 |
Vapor-etch cyclic process |
Andrew Li, Sanjeev Sapra, Rita J. Klein, Sanh D. Tang, Sourabh Dhir |
2020-03-31 |
$9,822,000 |
| 10497558 |
Using sacrificial polymer materials in semiconductor processing |
Michael T. Andreas, Jerome A. Imonigie, Sanjeev Sapra, Ian K. McDaniel |
2019-12-03 |
$20,797,000 |
| 10479938 |
Removing polysilicon |
Jerome A. Imonigie |
2019-11-19 |
$13,655,000 |
| 10113113 |
Removing polysilicon |
Jerome A. Imonigie |
2018-10-30 |
$45,682,000 |
| 9650570 |
Compositions for etching polysilicon |
Jerome A. Imonigie |
2017-05-16 |
$14,903,000 |
| 9653307 |
Surface modification compositions, methods of modifying silicon-based materials, and methods of forming high aspect ratio structures |
Jerome A. Imonigie, Ian C. Laboriante, Michael T. Andreas, Sanjeev Sapra |
2017-05-16 |
$14,903,000 |
| 9614153 |
Methods of selectively doping chalcogenide materials and methods of forming semiconductor devices |
Jerome A. Imonigie, Theodore M. Taylor, Scott E. Sills |
2017-04-04 |
$11,893,000 |
| 9236427 |
Multi-material structures and capacitor-containing semiconductor constructions |
Joseph Neil Greeley, Duane M. Goodner, Vishwanath Bhat, Vassil Antonov |
2016-01-12 |
$5,575,000 |
| 9159780 |
Methods of forming capacitors |
Joseph Neil Greeley, Niraj Rana |
2015-10-13 |
$7,358,000 |
| 9012318 |
Etching polysilicon |
Jerome A. Imonigie |
2015-04-21 |
$30,147,000 |
| 8969217 |
Methods of treating semiconductor substrates, methods of forming openings during semiconductor fabrication, and methods of removing particles from over semiconductor substrates |
Janos Fucsko, Niraj Rana, Sandra Tagg, Robert J. Hanson, Gundu M. Sabde +3 more |
2015-03-03 |
$13,945,000 |
| 8962460 |
Methods of selectively forming metal-doped chalcogenide materials, methods of selectively doping chalcogenide materials, and methods of forming semiconductor device structures including same |
Jerome A. Imonigie, Theodore M. Taylor, Scott E. Sills |
2015-02-24 |
$6,756,000 |
| 8946043 |
Methods of forming capacitors |
Joseph Neil Greeley, Niraj Rana |
2015-02-03 |
$8,965,000 |
| 8932933 |
Methods of forming hydrophobic surfaces on semiconductor device structures, methods of forming semiconductor device structures, and semiconductor device structures |
Ian C. Laboriante |
2015-01-13 |
$20,631,000 |
| 8865544 |
Methods of forming capacitors |
Joseph Neil Greeley, Duane M. Goodner, Vishwanath Bhat, Vassil Antonov |
2014-10-21 |
$19,042,000 |
| 8618000 |
Selective wet etching of hafnium aluminum oxide films |
Yi Yang |
2013-12-31 |
$8,053,000 |
| 8613864 |
Methods of forming semiconductor constructions |
— |
2013-12-24 |
$23,729,000 |
| 8512587 |
Highly selective doped oxide etchant |
Niraj Rana, Kevin J. Torek |
2013-08-20 |
$4,653,000 |
| 8492288 |
Methods of treating semiconductor substrates, methods of forming openings during semiconductor fabrication, and methods of removing particles from over semiconductor substrates |
Janos Fucsko, Niraj Rana, Sandra Tagg, Robert J. Hanson, Gundu M. Sabde +3 more |
2013-07-23 |
$5,823,000 |
| 8349687 |
Transistor gate forming methods and transistor structures |
Sanh D. Tang, Gordon A. Haller, Ravi Iyer |
2013-01-08 |
$3,201,000 |
| 8283258 |
Selective wet etching of hafnium aluminum oxide films |
Yi Yang |
2012-10-09 |
$2,419,000 |
| 8273261 |
Methods of forming semiconductor constructions |
— |
2012-09-25 |
$2,699,000 |
| 8252119 |
Microelectronic substrate cleaning systems with polyelectrolyte and associated methods |
Joseph Neil Greeley, Nishant Sinha, Lukasz J. Hupka, Timothy A. Quick |
2012-08-28 |
$3,290,000 |
