Issued Patents All Time
Showing 1–24 of 24 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12237189 | Wafer storage devices configured to measure physical properties of wafers stored therein | — | 2025-02-25 |
| 7988529 | Methods and tools for controlling the removal of material from microfeature workpieces | Rajshree Kothari, Gundu M. Sabde, James J. Hofmann | 2011-08-02 |
| 7527545 | Methods and tools for controlling the removal of material from microfeature workpieces | Rajshree Kothari, Gundu M. Sabde, James J. Hofmann | 2009-05-05 |
| 7381647 | Methods and systems for planarizing microelectronic devices with Ge-Se-Ag layers | Theodore M. Taylor | 2008-06-03 |
| 7347767 | Retaining rings, and associated planarizing apparatuses, and related methods for planarizing micro-device workpieces | — | 2008-03-25 |
| 7326105 | Retaining rings, and associated planarizing apparatuses, and related methods for planarizing micro-device workpieces | — | 2008-02-05 |
| 7314401 | Methods and systems for conditioning planarizing pads used in planarizing substrates | — | 2008-01-01 |
| 7258596 | Systems and methods for monitoring characteristics of a polishing pad used in polishing micro-device workpieces | Jason B. Elledge | 2007-08-21 |
| 7235000 | Methods and systems for conditioning planarizing pads used in planarizing substrates | — | 2007-06-26 |
| 7223297 | Planarizing solutions including abrasive elements, and methods for manufacturing and using such planarizing solutions | Theodore M. Taylor | 2007-05-29 |
| 7201635 | Methods and systems for conditioning planarizing pads used in planarizing substrates | — | 2007-04-10 |
| 7163439 | Methods and systems for conditioning planarizing pads used in planarizing substrates | — | 2007-01-16 |
| 7147543 | Carrier assemblies, planarizing apparatuses including carrier assemblies, and methods for planarizing micro-device workpieces | — | 2006-12-12 |
| 7115016 | Apparatus and method for mechanical and/or chemical-mechanical planarization of micro-device workpieces | — | 2006-10-03 |
| 7070478 | Systems and methods for monitoring characteristics of a polishing pad used in polishing micro-device workpieces | Jason B. Elledge | 2006-07-04 |
| 7033246 | Systems and methods for monitoring characteristics of a polishing pad used in polishing micro-device workpieces | Jason B. Elledge | 2006-04-25 |
| 7033248 | Systems and methods for monitoring characteristics of a polishing pad used in polishing micro-device workpieces | Jason B. Elledge | 2006-04-25 |
| 7011566 | Methods and systems for conditioning planarizing pads used in planarizing substrates | — | 2006-03-14 |
| 7008299 | Apparatus and method for mechanical and/or chemical-mechanical planarization of micro-device workpieces | — | 2006-03-07 |
| 7004817 | Carrier assemblies, planarizing apparatuses including carrier assemblies, and methods for planarizing micro-device workpieces | — | 2006-02-28 |
| 6958001 | Carrier assemblies, planarizing apparatuses including carrier assemblies, and methods for planarizing micro-device workpieces | — | 2005-10-25 |
| 6939211 | Planarizing solutions including abrasive elements, and methods for manufacturing and using such planarizing solutions | Theodore M. Taylor | 2005-09-06 |
| 6884144 | Methods and systems for planarizing microelectronic devices with Ge-Se-Ag layers | Theodore M. Taylor | 2005-04-26 |
| 6872132 | Systems and methods for monitoring characteristics of a polishing pad used in polishing micro-device workpieces | Jason B. Elledge | 2005-03-29 |