Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Methods and apparatuses for electrochemical-mechanical polishing

Methods and apparatuses for electrochemical-mechanical polishing

US Patent 8101060 · Granted Jan 24, 2012

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Electroplating systems2017
Methods of forming single crystal silicon structures and semiconductor device st2015
Methods of planarization and electro-chemical mechanical polishing processes2015
Methods and systems for removing materials from microfeature workpieces with org2013
Methods of etching single crystal silicon2013
Electroplating systems2013
Semiconductor structures including square cuts in single crystal silicon and met2012
Single crystal silicon structures2012
Method for selectively removing conductive material from a microelectronic subst2011
Method for removing metal layers formed outside an aperture of a BPSG layer util2011
High selectivity BPSG to TEOS etchant2011
Methods and apparatus for electromechanically and/or electrochemically-mechanica2011