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Home › Method for removing metal layers formed outside an aperture of a BPSG layer utilizing multiple etching processes including electrochemical-mechanical polishing

Method for removing metal layers formed outside an aperture of a BPSG layer utilizing multiple etching processes including electrochemical-mechanical polishing

US Patent 8048756 · Granted Nov 1, 2011

Estimated economic value: $3,857,000 ⓘ

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