Issued Patents All Time
Showing 51–75 of 189 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7094690 | Deposition methods and apparatuses providing surface activation | Gurtej S. Sandhu, Garo Derderian, Terry L. Gilton | 2006-08-22 |
| 7091654 | Field emission tips, arrays, and devices | Sanh D. Tang, Zhaohui Huang | 2006-08-15 |
| 7078308 | Method and apparatus for removing adjacent conductive and nonconductive materials of a microelectronic substrate | Whonchee Lee, Scott Meikle | 2006-07-18 |
| RE39194 | Method and apparatus for controlling planarizing characteristics in mechanical and chemical-mechanical planarization of microelectronic substrates | — | 2006-07-18 |
| 7049244 | Method for enhancing silicon dioxide to silicon nitride selectivity | David S. Becker, Fred L. Roe | 2006-05-23 |
| 7037179 | Methods and apparatuses for making and using planarizing pads for mechanical and chemical-mechanical planarization of microelectronic substrates | — | 2006-05-02 |
| 7022618 | Method of forming a conductive contact | Sujit Sharan, Gurtej S. Sandhu | 2006-04-04 |
| 7022605 | Atomic layer deposition methods | Trung T. Doan, Gurtej S. Sandhu | 2006-04-04 |
| 7020365 | Resistive heater for thermo optic device | Gurtej S. Sandhu | 2006-03-28 |
| 7006746 | Waveguide for thermo optic device | Howard E. Rhodes, Vishnu K. Agarwal, Gurtej S. Sandhu, James Foresi, Jean-Francois Viens +1 more | 2006-02-28 |
| 6960534 | Method for controlling the temperature of a gas distribution plate in a process reactor | Kevin G. Donohoe | 2005-11-01 |
| 6952108 | Methods for fabricating plasma probes | — | 2005-10-04 |
| 6939813 | Apparatus for improved low pressure inductively coupled high density plasma reactor | Kevin G. Donohoe | 2005-09-06 |
| 6916723 | Methods of forming rugged semiconductor-containing surfaces | Shenlin Chen, Trung T. Doan, Lyle Breiner, Er-Xuan Ping | 2005-07-12 |
| 6897070 | Detection of gas phase materials | — | 2005-05-24 |
| 6887755 | Methods of forming rugged silicon-containing surfaces | Lyle Breiner | 2005-05-03 |
| 6884725 | Methods of forming materials within openings, and methods of forming isolation regions | John T. Moore | 2005-04-26 |
| 6875371 | Etchant with selectivity for doped silicon dioxide over undoped silicon dioxide and silicon nitride, processes which employ the etchant, and structures formed thereby | Kei-Yu Ko, Li Li | 2005-04-05 |
| 6858526 | Methods of forming materials between conductive electrical components, and insulating materials | Werner Juengling, Kirk D. Prall, Ravi Iyer, Gurtej S. Sandhu | 2005-02-22 |
| 6841525 | Dilute cleaning composition and method for using same | Max Hineman | 2005-01-11 |
| 6833049 | Apparatus for controlling the temperature of a gas distribution plate in a process reactor | Kevin G. Donohoe | 2004-12-21 |
| 6827824 | Enhanced collimated deposition | Gurtej S. Sandhu | 2004-12-07 |
| 6828227 | Method for applying uniform pressurized film across wafer | Hugh E. Stroupe, Lynn J. Carroll | 2004-12-07 |
| 6812160 | Methods of forming materials between conductive electrical components, and insulating materials | Werner Juengling, Kirk D. Prall, Ravi Iyer, Gurtej S. Sandhu | 2004-11-02 |
| 6758735 | Methods and apparatuses for making and using planarizing pads for mechanical and chemical-mechanical planarization of microelectronic substrates | — | 2004-07-06 |