Issued Patents All Time
Showing 151–175 of 189 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6056850 | Apparatus for improving the performance of a temperature-sensitive etch process | Bradley J. Howard | 2000-05-02 |
| 6051502 | Methods of forming conductive components and methods of forming conductive lines | Harlan Frankamp | 2000-04-18 |
| 6043151 | Method for forming a semiconductor connection with a top surface having an enlarged recess | Fernando Gonzalez, Kirk D. Prall | 2000-03-28 |
| 6025271 | Method of removing surface defects or other recesses during the formation of a semiconductor device | Bradley J. Howard, Mark E. Jost | 2000-02-15 |
| RE36518 | Method for making electrical contact with an active area through sub-micron contact openings and a semiconductor device | Charles H. Dennison | 2000-01-18 |
| 6015760 | Method for enhancing oxide to nitride selectivity through the use of independent heat control | David S. Becker, Fred L. Roe | 2000-01-18 |
| 5997384 | Method and apparatus for controlling planarizing characteristics in mechanical and chemical-mechanical planarization of microelectronic substrates | — | 1999-12-07 |
| 5994220 | Method for forming a semiconductor connection with a top surface having an enlarged recess | Fernando Gonzalez, Kirk D. Prall | 1999-11-30 |
| 5980688 | Plasma reactors and method of cleaning a plasma reactor | — | 1999-11-09 |
| 5967030 | Global planarization method and apparatus | — | 1999-10-19 |
| 5958796 | Method for cleaning waste matter from the backside of a semiconductor wafer substrate | Kirk D. Prall | 1999-09-28 |
| 5945348 | Method for reducing the heights of interconnects on a projecting region with a smaller reduction in the heights of other interconnects | Scott Meikle, Sung-Cheol Kim, Kirk D. Prall | 1999-08-31 |
| 5899749 | In situ etch process for insulating and conductive materials | David S. Becker | 1999-05-04 |
| 5892285 | Semiconductor connection with a top surface having an enlarged recess | Fernando Gonzalez, Kirk D. Prall | 1999-04-06 |
| 5880036 | Method for enhancing oxide to nitride selectivity through the use of independent heat control | David S. Becker, Lyle Breiner | 1999-03-09 |
| 5814527 | Method of making small pores defined by a disposable internal spacer for use in chalcogenide memories | Graham R. Wolstenholme, Steven T. Harshfield, Raymond A. Turi, Fernando Gonzalez, Donwon Park | 1998-09-29 |
| 5783100 | Method of high density plasma etching for semiconductor manufacture | Kevin G. Donohoe | 1998-07-21 |
| 5779849 | Plasma reactors and method of cleaning a plasma reactor | — | 1998-07-14 |
| 5716873 | Method for cleaning waste matter from the backside of a semiconductor wafer substrate | Kirk D. Prall | 1998-02-10 |
| 5711851 | Process for improving the performance of a temperature-sensitive etch process | Bradley J. Howard | 1998-01-27 |
| 5691246 | In situ etch process for insulating and conductive materials | David S. Becker | 1997-11-25 |
| 5647913 | Plasma reactors | — | 1997-07-15 |
| 5514246 | Plasma reactors and method of cleaning a plasma reactor | — | 1996-05-07 |
| 5438011 | Method of forming a capacitor using a photoresist contact sidewall having standing wave ripples | Bradley J. Howard | 1995-08-01 |
| 5417826 | Removal of carbon-based polymer residues with ozone, useful in the cleaning of plasma reactors | — | 1995-05-23 |