Issued Patents All Time
Showing 51–75 of 97 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7903264 | Structure inspection method, pattern formation method, process condition determination method and resist pattern evaluation apparatus | Kei Hayasaki, Toru Mikami, Shinichi Ito, Yuichiro Yamazaki | 2011-03-08 |
| 7794897 | Mask pattern correcting method, mask pattern inspecting method, photo mask manufacturing method, and semiconductor device manufacturing method | Satoshi Tanaka, Shigeki Nojima, Koji Hashimoto, Soichi Inoue | 2010-09-14 |
| 7793252 | Mask pattern preparation method, semiconductor device manufacturing method and recording medium | Shigeki Nojima, Shoji Mimotogi | 2010-09-07 |
| 7788626 | Pattern data correction method, pattern checking method, pattern check program, photo mask producing method, and semiconductor device manufacturing method | Shigeki Nojima, Satoshi Tanaka, Kyoko Izuha, Soichi Inoue | 2010-08-31 |
| 7770145 | Semiconductor device pattern creation method, pattern data processing program, and semiconductor device manufacturing method | Ayako Nakano, Satoshi Tanaka | 2010-08-03 |
| 7738276 | Semiconductor device and method for manufacturing | Kosuke Yanagidaira, Takuya Futatsuyama | 2010-06-15 |
| 7716628 | System, method and program for generating mask data, exposure mask and semiconductor device in consideration of optical proximity effects | Satoshi Tanaka, Kazuya Fukuhara | 2010-05-11 |
| 7716617 | Semiconductor device, method for making pattern layout, method for making mask pattern, method for making layout, method for manufacturing photo mask, photo mask, and method for manufacturing semiconductor device | Hiromitsu Mashita, Atsushi Maesono, Ayako Nakano, Tadahito Fujisawa | 2010-05-11 |
| 7713833 | Method for manufacturing semiconductor device | Hiromitsu Mashita, Hidefumi Mukai, Fumiharu Nakajima, Chikaaki Kodama | 2010-05-11 |
| 7700997 | Semiconductor memory device | Takuya Futatsuyama, Hiromitsu Mashita, Atsushi Maesono, Ayako Nakano, Tadahito Fujisawa | 2010-04-20 |
| 7669172 | Pattern creation method, mask manufacturing method and semiconductor device manufacturing method | Takeshi Ito, Satoshi Tanaka, Tadahito Fujisawa, Koji Hashimoto | 2010-02-23 |
| 7631287 | Calculating method, verification method, verification program and verification system for edge deviation quantity, and semiconductor device manufacturing method | Kyoko Izuha, Satoshi Tanaka | 2009-12-08 |
| 7614026 | Pattern forming method, computer program thereof, and semiconductor device manufacturing method using the computer program | Hirotaka Ichikawa | 2009-11-03 |
| 7594216 | Method and system for forming a mask pattern, method of manufacturing a semiconductor device, system forming a mask pattern on data, cell library and method of forming a photomask | Satoshi Tanaka, Soichi Inoue | 2009-09-22 |
| 7585597 | Mask pattern data generating method, photo mask manufacturing method, and semiconductor device manufacturing method | Tadahito Fujisawa, Takeshi Ito | 2009-09-08 |
| 7571417 | Method and system for correcting a mask pattern design | Kyoko Izuha, Shigeki Nojima, Satoshi Tanaka | 2009-08-04 |
| 7560197 | Mask pattern data producing method, patterning method, reticle correcting method, reticle manufacturing method, and semiconductor apparatus manufacturing method | Hiroko Nakamura, Satoshi Tanaka, Shoji Mimotogi | 2009-07-14 |
| 7530049 | Mask manufacturing system, mask data creating method and manufacturing method of semiconductor device | Sachiko Kobayashi | 2009-05-05 |
| 7526748 | Design pattern data preparing method, mask pattern data preparing method, mask manufacturing method, semiconductor device manufacturing method, and program recording medium | Satoshi Tanaka, Shigeki Nojima, Soichi Inoue | 2009-04-28 |
| 7523437 | Pattern-producing method for semiconductor device | Suigen Kyoh, Soichi Inoue | 2009-04-21 |
| 7506301 | Method for correcting a mask pattern, system for correcting a mask pattern, program, method for manufacturing a photomask and method for manufacturing a semiconductor device | Satoshi Tanaka, Soichi Inoue | 2009-03-17 |
| 7499582 | Method for inspecting a defect in a photomask, method for manufacturing a semiconductor device and method for producing a photomask | Suigen Kyoh, Shinji Yamaguchi, Soichi Inoue | 2009-03-03 |
| 7482661 | Pattern forming method and semiconductor device manufactured by using said pattern forming method | Satoshi Tanaka, Soichi Inoue | 2009-01-27 |
| 7483155 | Structure inspection method, pattern formation method, process condition determination method and resist pattern evaluation apparatus | Kei Hayasaki, Toru Mikami, Shinichi Ito, Yuichiro Yamazaki | 2009-01-27 |
| 7458057 | Pattern correction method, pattern correction system, mask manufacturing method, semiconductor device manufacturing method, recording medium, and designed pattern | — | 2008-11-25 |