Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8042067 | Pattern forming method and system, and method of manufacturing a semiconductor device | Toshiya Kotani | 2011-10-18 |
| 7984390 | Data processing method in semiconductor device, program of the same, and manufacturing method of semiconductor device | Toshiya Kotani, Atsushi Watanabe | 2011-07-19 |
| 7859665 | Polarization analyzing system, exposure method, and method for manufacturing semiconductor device | Takashi Sato | 2010-12-28 |
| 7770145 | Semiconductor device pattern creation method, pattern data processing program, and semiconductor device manufacturing method | Satoshi Tanaka, Toshiya Kotani | 2010-08-03 |
| 7716617 | Semiconductor device, method for making pattern layout, method for making mask pattern, method for making layout, method for manufacturing photo mask, photo mask, and method for manufacturing semiconductor device | Hiromitsu Mashita, Toshiya Kotani, Atsushi Maesono, Tadahito Fujisawa | 2010-05-11 |
| 7700997 | Semiconductor memory device | Takuya Futatsuyama, Toshiya Kotani, Hiromitsu Mashita, Atsushi Maesono, Tadahito Fujisawa | 2010-04-20 |
| 7534533 | Polarization analyzing system, exposure method, and method for manufacturing semiconductor device | Takashi Sato | 2009-05-19 |
| 7463347 | Simulator of optical intensity distribution, computer implemented method for simulating the optical intensity distribution, method for collecting mask pattern, and computer program product for the simulator | Takashi Sato | 2008-12-09 |
| 7402363 | Pattern forming method and system, and method of manufacturing a semiconductor device | Toshiya Kotani | 2008-07-22 |
| 7002665 | Lithography simulation method, mask pattern correction method, and substrate topography correction method | Takashi Sato, Satoshi Tanaka | 2006-02-21 |
| 7000215 | Method of and computer program product for designing patterns, and method of manufacturing semiconductor device | Koji Hashimoto, Takashi Sato, Tsuyoshi Shibata, Yuji Kobayashi | 2006-02-14 |