Issued Patents All Time
Showing 51–70 of 70 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6929903 | Developing method, substrate treating method, and substrate treating apparatus | Ikuo Yoneda, Hideaki Sakurai | 2005-08-16 |
| 6727565 | Manufacturing method for exposure mask, generating method for mask substrate information, mask substrate, exposure mask, manufacturing method for semiconductor device and server | — | 2004-04-27 |
| 6660455 | Pattern formation material, pattern formation method, and exposure mask fabrication method | Takehiro Kondoh | 2003-12-09 |
| 6649310 | Method of manufacturing photomask | Shigeki Nojima, Shoji Mimotogi, Osamu Ikenaga | 2003-11-18 |
| 6550990 | Substrate processing apparatus and processing method by use of the apparatus | Hideaki Sakurai, Shinichi Ito | 2003-04-22 |
| 6537844 | Manufacturing method for exposure mask, generating method for mask substrate information, mask substrate, exposure mask, manufacturing method for semiconductor device and server | — | 2003-03-25 |
| 6316163 | Pattern forming method | Shunko Magoshi, Shinji Sato, Soichi Inoue, Kazuyoshi Sugihara, Katsuya Okumura | 2001-11-13 |
| 6204511 | Electron beam image picturing method and image picturing device | Shunko Magoshi, Shinji Sato | 2001-03-20 |
| 6172364 | Charged particle beam irradiation apparatus | Munehiro Ogasawara, Jun Takamatsu, Naoharu Shimomura, Shusuke Yoshitake, Takayuki Abe | 2001-01-09 |
| 5909030 | Pattern transfer apparatus, an operation management system thereof, and an operation management system for a semiconductor manufacture apparatus | Shusuke Yoshitake, Tadahiro Takigawa | 1999-06-01 |
| 5907393 | Exposure mask and method and apparatus for manufacturing the same | Kenji Kawano, Shinichi Ito, Iwao Higashikawa, Takashi Kamo, Hiroaki Hazama +1 more | 1999-05-25 |
| 5792376 | Plasma processing apparatus and plasma processing method | Hideki Kanai, Ikuo Yoneda | 1998-08-11 |
| 5728494 | Exposure mask and method and apparatus for manufacturing the same | Kenji Kawano, Shinichi Ito, Iwao Higashikawa, Takashi Kamo, Hiroaki Hazama +1 more | 1998-03-17 |
| 5629115 | Exposure mask and method and apparatus for manufacturing the same | Kenji Kawano, Shinichi Ito, Iwao Higashikawa, Takashi Kamo, Hiroaki Hazama +1 more | 1997-05-13 |
| 5291536 | X-ray mask, method for fabricating the same, and pattern formation method | Shinji Sugihara, Ken Murooka | 1994-03-01 |
| 5188706 | Method of manufacturing an X-ray exposure mask and device for controlling the internal stress of thin films | Masaru Hori | 1993-02-23 |
| 5166962 | X-ray mask, method of manufacturing the same, and exposure method using the same | Ken Murooka | 1992-11-24 |
| 4311721 | Method of purifying distillers solubles and use of the purified matter | Kiyoshi Yoshizawa, Kikuo Nojiro, Hiroshi Kiuchi, Kazuo Horii | 1982-01-19 |
| 4278699 | Method of purifying distillers solubles and use of the purified matter | Kiyoshi Yoshizawa, Kikuo Nojiro, Hiroshi Kiuchi, Kazuo Horii | 1981-07-14 |
| 4237232 | Method of purifying distillers solubles and use of the purified matter | Kiyoshi Yoshizawa, Kikuo Nojiro, Hiroshi Kiuchi, Kazuo Horii | 1980-12-02 |