Issued Patents All Time
Showing 26–50 of 70 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8071263 | Reflective mask and manufacturing method for reflective mask | Ryoichi Inanami, Yumi Nakajima | 2011-12-06 |
| 8025732 | Apparatus for processing a substrate | Hideaki Sakurai | 2011-09-27 |
| 7998759 | Maunfacturing method for exposure mask, generating method for mask substrate information, mask substrate, exposure mask, manufacturing method for semiconductor device and server | — | 2011-08-16 |
| 7960075 | Photomask unit, exposing method and method for manufacturing semiconductor device | Satoshi Nagai, Kazuya Fukuhara, Kenji Kawano, Satoshi Tanaka | 2011-06-14 |
| 7912275 | Method of evaluating a photo mask and method of manufacturing a semiconductor device | Hiroki Yamamoto, Osamu Ikenaga, Shoji Mimotogi, Hideki Kanai, Yukiyasu Arisawa | 2011-03-22 |
| 7906257 | Photomask manufacturing method and semiconductor device manufacturing method | — | 2011-03-15 |
| 7904851 | Photomask manufacturing method and semiconductor device manufacturing method | Takashi Hirano, Kazuya Fukuhara | 2011-03-08 |
| 7740994 | Method for selecting photomask substrate, method for manufacturing photomask, and method for manufacturing semiconductor device | Kazuya Fukuhara | 2010-06-22 |
| 7703066 | Exposure mask manufacturing method, drawing apparatus, semiconductor device manufacturing method, and mask blanks product | — | 2010-04-20 |
| 7673281 | Pattern evaluation method and evaluation apparatus and pattern evaluation program | Eiji Yamanaka, Mitsuyo Asano, Shinji Yamaguchi | 2010-03-02 |
| 7629088 | Mask defect repairing method and semiconductor device manufacturing method | — | 2009-12-08 |
| 7608368 | Pattern forming method, photomask manufacturing method, semiconductor device manufacturing method, and computer program product | Hideaki Sakurai, Tooru Shibata, Masato Saito | 2009-10-27 |
| 7479365 | Semiconductor device manufacturing method | — | 2009-01-20 |
| 7435609 | Manufacturing method for exposure mask, generating method for mask substrate information, mask substrate, exposure mask, manufacturing method for semiconductor device and server | — | 2008-10-14 |
| 7390365 | Developing method, substrate treating method, and substrate treating apparatus | Ikuo Yoneda, Hideaki Sakurai | 2008-06-24 |
| 7384713 | Exposure mask blank manufacturing method and exposure mask manufacturing method | — | 2008-06-10 |
| 7354869 | Substrate processing method, substrate processing apparatus, and semiconductor device manufacturing method | Hideaki Sakurai | 2008-04-08 |
| 7351504 | Photomask blank substrate, photomask blank and photomask | Masayuki Nakatsu, Tsuneo Numanami, Masayuki Mogi, Tsuneyuki Hagiwara, Naoto Kondo | 2008-04-01 |
| 7329475 | Method of selecting photomask blank substrates | Masayuki Nakatsu, Tsuneo Numanami, Masayuki Mogi, Tsuneyuki Hagiwara, Naoto Kondo | 2008-02-12 |
| 7313781 | Image data correction method, lithography simulation method, image data correction system, program, mask and method of manufacturing a semiconductor device | Mitsuyo Asano, Eiji Yamanaka, Shinji Yamaguchi | 2007-12-25 |
| 7211354 | Mask substrate and its manufacturing method | — | 2007-05-01 |
| 7097946 | Photomask, method of manufacturing a photomask, and method of manufacturing an electronic product | Sachiyo Ito, Masahiko Hasunuma | 2006-08-29 |
| 7094522 | Developing method, substrate treating method, and substrate treating apparatus | Ikuo Yoneda, Hideaki Sakurai | 2006-08-22 |
| 7060519 | Manufacturing method for exposure mask, generating method for mask substrate information, mask substrate, exposure mask, manufacturing method for semiconductor device and server | — | 2006-06-13 |
| 7001086 | Developing method, substrate treating method, and substrate treating apparatus | Ikuo Yoneda, Hideaki Sakurai | 2006-02-21 |