Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11378532 | Inspection system and inspection method to qualify semiconductor structures | Brett Lewis, Wilhelm Kuehn, Deying Xia, Shawn McVey | 2022-07-05 |
| 10509330 | Method and device for characterizing a wafer patterned using at least one lithography step | Hans-Michael Stiepan, Andy Zott | 2019-12-17 |
| 9236225 | Ion sources, systems and methods | Billy W. Ward, John A. Notte, IV, Louis S. Farkas, III, Randall G. Percival, Raymond Hill +3 more | 2016-01-12 |
| 9012867 | Ion sources, systems and methods | Billy W. Ward, John A. Notte, IV, Louis S. Farkas, III, Randall G. Percival, Raymond Hill +3 more | 2015-04-21 |
| 8748845 | Ion sources, systems and methods | Billy W. Ward, John A. Notte, IV, Louis S. Farkas, III, Randall G. Percival, Raymond Hill +3 more | 2014-06-10 |
| 8723138 | Electron beam source and method of manufacturing the same | Volker Drexel, Bernd Irmer, Christian Penzkofer | 2014-05-13 |
| 8384029 | Cross-section systems and methods | Rainer Knippelmeyer, Lawrence Scipioni, Christoph Riedesel, John Morgan, Ulrich Wagemann | 2013-02-26 |
| 8164071 | Electron beam source and method of manufacturing the same | Volker Drexel, Bernd Irmer, Christian Penzkofer | 2012-04-24 |
| 8110814 | Ion sources, systems and methods | Billy W. Ward, John A. Notte, IV, Louis S. Farkas, III, Randall G. Percival, Raymond Hill +3 more | 2012-02-07 |
| 7518122 | Ion sources, systems and methods | Billy W. Ward, John A. Notte, IV, Louis S. Farkas, III, Randall G. Percival, Raymond Hill +1 more | 2009-04-14 |
| 7485873 | Ion sources, systems and methods | Billy W. Ward, John A. Notte, IV, Louis S. Farkas, III, Randall G. Percival, Raymond Hill +3 more | 2009-02-03 |
| 7427774 | Targets for measurements in semiconductor devices | Shoaib Zaidi, Christopher Gould | 2008-09-23 |
| 7405089 | Method and apparatus for measuring a surface profile of a sample | Harald Bloess, Uwe Wellhausen, Peter Reinig, Peter Weidner, Pierre-Yves Guittet | 2008-07-29 |
| 7362453 | Method for the characterization of a film | — | 2008-04-22 |
| 7358491 | Method and apparatus for the depth-resolved characterization of a layer of a carrier | Harald Bloeβ | 2008-04-15 |
| 7307735 | Method for determining the depth of a buried structure | Thomas Hecht, Uwe Schroder, Stefan Jakschik, Andreas Orth | 2007-12-11 |
| 7262837 | Noninvasive method for characterizing and identifying embedded micropatterns | Pierre-Yves Guittet, Eckhard Marx | 2007-08-28 |
| 7046363 | Optical measurement system and method | Alexander Michaelis, Oliver Genz | 2006-05-16 |
| 6486675 | In-situ method for measuring the endpoint of a resist recess etch process | Venkatachalam C. Jaiprakash | 2002-11-26 |
| 6031614 | Measurement system and method for measuring critical dimensions using ellipsometry | Alexander Michaelis, Oliver Genz | 2000-02-29 |