Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7427774 | Targets for measurements in semiconductor devices | Ulrich Mantz, Shoaib Zaidi | 2008-09-23 |
| 7358493 | Method and apparatus for automated beam optimization in a scanning electron microscope | William Roberts | 2008-04-15 |
| 7184853 | Lithography method and system with correction of overlay offset errors caused by wafer processing | William Roberts, Nicholas Louka | 2007-02-27 |
| 7127304 | System and method to predict the state of a process controller in a semiconductor manufacturing facility | Abeer Singhal | 2006-10-24 |
| 4985980 | Net forming method | — | 1991-01-22 |