Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11714357 | Method to predict yield of a device manufacturing process | Alexander Ypma, Cyrus E. Tabery, Simon Hendrik Celine Van Gorp, Chenxi Lin, Dag Sonntag +9 more | 2023-08-01 |
| 11385554 | Metrology apparatus and method for determining a characteristic relating to one or more structures on a substrate | Miguel GARCIA GRANDA, Steven E. Steen, Eric Brouwer, Bart Peter Bert Segers, Frank Staals +1 more | 2022-07-12 |
| 11086229 | Method to predict yield of a device manufacturing process | Alexander Ypma, Cyrus E. Tabery, Simon Hendrik Celine Van Gorp, Chenxi Lin, Dag Sonntag +9 more | 2021-08-10 |
| 10895811 | Methods and patterning devices and apparatuses for measuring focus performance of a lithographic apparatus, device manufacturing method | Miguel GARCIA GRANDA, Elliott Gerard MC NAMARA, Eric Brouwer, Bart Peter Bert Segers | 2021-01-19 |
| 8778702 | Method of inspecting and processing semiconductor wafers | Lars Markwort, Reza Kharrazian, Christoph Kappel | 2014-07-15 |
| 8501503 | Methods of inspecting and manufacturing semiconductor wafers | Lars Markwort | 2013-08-06 |
| 8460946 | Methods of processing and inspecting semiconductor substrates | Lars Markwort, Sandip Halder, Anne Jourdain | 2013-06-11 |
| 7405089 | Method and apparatus for measuring a surface profile of a sample | Harald Bloess, Uwe Wellhausen, Peter Reinig, Peter Weidner, Ulrich Mantz | 2008-07-29 |
| 7372579 | Apparatus and method for monitoring trench profiles and for spectrometrologic analysis | Zhen Chen, Peter Weidner, Alexander Kasic, Barbara Schmidt, Anita Klee | 2008-05-13 |
| 7262837 | Noninvasive method for characterizing and identifying embedded micropatterns | Ulrich Mantz, Eckhard Marx | 2007-08-28 |