Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7372579 | Apparatus and method for monitoring trench profiles and for spectrometrologic analysis | Zhen Chen, Peter Weidner, Pierre-Yves Guittet, Alexander Kasic, Barbara Schmidt | 2008-05-13 |