Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7773232 | Apparatus and method for determining trench parameters | Peter Weidner, Elke Gehring | 2010-08-10 |
| 7372579 | Apparatus and method for monitoring trench profiles and for spectrometrologic analysis | Zhen Chen, Peter Weidner, Pierre-Yves Guittet, Barbara Schmidt, Anita Klee | 2008-05-13 |