Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10895811 | Methods and patterning devices and apparatuses for measuring focus performance of a lithographic apparatus, device manufacturing method | Miguel GARCIA GRANDA, Pierre-Yves Guittet, Eric Brouwer, Bart Peter Bert Segers | 2021-01-19 |
| 9360768 | Inspection method and apparatus | Gerardo Bottiglieri, Ruben Alvarez Sanchez | 2016-06-07 |