Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7635392 | Scanning probe microscopy cantilever, corresponding manufacturing method, scanning probe microscope, and scanning method | Andreas Heidelberg, Jens-Hendrik Zollondz | 2009-12-22 |
| 7405089 | Method and apparatus for measuring a surface profile of a sample | Uwe Wellhausen, Peter Reinig, Peter Weidner, Pierre-Yves Guittet, Ulrich Mantz | 2008-07-29 |
| 7005640 | Method and apparatus for the characterization of a depth structure in a substrate | — | 2006-02-28 |