Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12386268 | Method for calibrating simulation process based on defect-based process window | Koenraad VAN INGEN SCHENAU, Abraham SLACHTER, Vadim Yourievich TIMOSHKOV, Marleen KOOIMAN, Marie-Claire VAN LARE +5 more | 2025-08-12 |
| 10962887 | Lithographic method | Patricius Aloysius Jacobus Tinnemans, Edo Maria Hulsebos, Henricus Johannes Lambertus Megens, Boris Menchtchikov, Ahmet Koray Erdamar +13 more | 2021-03-30 |
| 10559503 | Methods, apparatus and system for a passthrough-based architecture | Guillaume Bouche, Tuhin Guha Neogi, Andy Chi-Hung Wei, Jia Zeng, Jongwook Kye +3 more | 2020-02-11 |
| 10527958 | Lithographic method | Patricius Aloysius Jacobus Tinnemans, Edo Maria Hulsebos, Henricus Johannes Lambertus Megens, Boris Menchtchikov, Ahmet Koray Erdamar +13 more | 2020-01-07 |
| 10236350 | Method, apparatus and system for a high density middle of line flow | Guillaume Bouche, Tuhin Guha Neogi, Andy Chi-Hung Wei, Jason E. Stephens, Vikrant Chauhan +1 more | 2019-03-19 |
| 9852984 | Cut first alternative for 2D self-aligned via | Guillaume Bouche, Andy Wei | 2017-12-26 |
| 9818651 | Methods, apparatus and system for a passthrough-based architecture | Guillaume Bouche, Tuhin Guha Neogi, Andy Chi-Hung Wei, Jia Zeng, Jongwook Kye +3 more | 2017-11-14 |
| 9478506 | Multilayer pattern transfer for chemical guides | Richard A. Farrell, Gerard Schmid | 2016-10-25 |
| 9425097 | Cut first alternative for 2D self-aligned via | Guillaume Bouche, Andy Wei | 2016-08-23 |
| 9362165 | 2D self-aligned via first process flow | Guillaume Bouche, Andy Wei | 2016-06-07 |
| 8956789 | Methods for fabricating integrated circuits including multi-patterning of masks for extreme ultraviolet lithography | — | 2015-02-17 |
| 8911920 | Methods for fabricating EUV masks and methods for fabricating integrated circuits using such EUV masks | Pawitter S. Mangat, Hui Peng Koh | 2014-12-16 |
| 8673165 | Sidewall image transfer process with multiple critical dimensions | Sivananda K. Kanakasabapathy, Ryan O. Jung, Allen H. Gabor, Sean D. Burns, Erin Catherine McLellan | 2014-03-18 |