Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8911920 | Methods for fabricating EUV masks and methods for fabricating integrated circuits using such EUV masks | Sudharshanan Raghunathan, Hui Peng Koh | 2014-12-16 |
| 8592103 | Extreme ultraviolet masks having annealed light-absorptive borders and associated fabrication methods | Lei Sun, Oleg Kritsun | 2013-11-26 |
| 6355384 | Mask, its method of formation, and a semiconductor device made thereby | William J. Dauksher | 2002-03-12 |