Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8592103 | Extreme ultraviolet masks having annealed light-absorptive borders and associated fabrication methods | Pawitter S. Mangat, Lei Sun | 2013-11-26 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8592103 | Extreme ultraviolet masks having annealed light-absorptive borders and associated fabrication methods | Pawitter S. Mangat, Lei Sun | 2013-11-26 |