Issued Patents All Time
Showing 1–25 of 40 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10796882 | Charged particle beam writing apparatus and charged particle beam writing method | Hideo Inoue | 2020-10-06 |
| 10784080 | Multiple charged particle beam writing apparatus, and multiple charged particle beam writing method | Hideo Inoue | 2020-09-22 |
| RE47561 | Multi charged particle beam writing method and multi charged particle beam writing apparatus | Munehiro Ogasawara | 2019-08-06 |
| 10020159 | Multi charged particle beam writing method and multi charged particle beam writing apparatus | Hiroshi Matsumoto, Tomohiro Iijima, Munehiro Ogasawara, Hideo Inoue | 2018-07-10 |
| 9934935 | Multi charged particle beam writing apparatus and multi charged particle beam writing method | Hideo Inoue, Hayato Kimura, Yasuo Kato, Jun Yashima | 2018-04-03 |
| 9805905 | Blanking device for multi-beam of charged particle writing apparatus using multi-beam of charged particle and defective beam blocking method for multi-beam of charged particle | Hiroshi Yamashita, Kazuhiro Chiba, Hiroshi Matsumoto | 2017-10-31 |
| 9691585 | Multi charged particle beam writing method, and multi charged particle beam writing apparatus | Hiroshi Matsumoto, Munehiro Ogasawara | 2017-06-27 |
| 9570267 | Multi charged particle beam writing method and multi charged particle beam writing apparatus | Hiroshi Matsumoto, Tomohiro Iijima, Munehiro Ogasawara, Hideo Inoue | 2017-02-14 |
| 9530610 | Blanking aperture array device for multi-beams, and fabrication method of blanking aperture array device for multi-beams | Kazuhiro Chiba, Hiroshi Matsumoto, Munehiro Ogasawara, Hirofumi Morita, Hirokazu Yamada +6 more | 2016-12-27 |
| 9343268 | Multi charged particle beam writing apparatus and multi charged particle beam writing method | Munehiro Ogasawara | 2016-05-17 |
| 9287090 | Multi charged particle beam writing apparatus, and multi charged particle beam writing method | Hiroshi Matsumoto | 2016-03-15 |
| 9202673 | Multi charged particle beam writing method and multi charged particle beam writing apparatus | Hiroshi Matsumoto, Tomohiro Iijima, Munehiro Ogasawara, Hideo Inoue | 2015-12-01 |
| 9076564 | Multi charged particle beam writing apparatus and multi charged particle beam writing method | Munehiro Ogasawara | 2015-07-07 |
| 8907306 | Multi charged particle beam writing apparatus and multi charged particle beam writing method | Munehiro Ogasawara | 2014-12-09 |
| 8741547 | Multi charged particle beam writing apparatus and multi charged particle beam writing method | Munehiro Ogasawara | 2014-06-03 |
| 8729507 | Multi charged particle beam writing method and multi charged particle beam writing apparatus | Muehiro Ogasawara | 2014-05-20 |
| 8710467 | Multi charged particle beam writing apparatus and multi charged particle beam writing method | Munehiro Ogasawara | 2014-04-29 |
| 8586951 | Multi charged particle beam writing apparatus and multi charged particle beam writing method | Munehiro Ogasawara | 2013-11-19 |
| 7878060 | Motion sensor and method of manufacturing the same | — | 2011-02-01 |
| 5760410 | Electron beam lithography apparatus and method | Kazuto Matsuki, Shuichi Tamamushi, Toshio Yamaguchi | 1998-06-02 |
| 5404410 | Method and system for generating a bit pattern | Toru Tojo, Hideo Tsuchiya, Kyoji Yamashita, Mitsuo Tabata | 1995-04-04 |
| 5185812 | Optical pattern inspection system | Kyoji Yamashita, Masakazu Tokita | 1993-02-09 |
| 4656466 | Electro-optic display device | Masaaki Yoshida, Naoki Nagase, Masanori Yamada | 1987-04-07 |
| 4647782 | Charged particle beam exposure apparatus | Hirotsugu Wada, Shunichi Sano, Mamoru Nakasuji | 1987-03-03 |
| 4623256 | Apparatus for inspecting mask used for manufacturing integrated circuits | Osamu Ikenaga | 1986-11-18 |