Issued Patents All Time
Showing 25 most recent of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12198896 | Compact high density plasma source | Neil Benjamin, Lee Chen, Alan M. Schoepp, Clint Thomas, Thomas W. Anderson +1 more | 2025-01-14 |
| 9927798 | Mobile connectivity and control of semiconductor manufacturing equipment | Chung-Ho Huang, Simon Gosselin, Vincent Wong, Ronald Ramnarine, Neal Newton +4 more | 2018-03-27 |
| 9541514 | Method and apparatus for diagnosing status of parts in real time in plasma processing equipment | — | 2017-01-10 |
| 9279758 | Method and apparatus for diagnosing status of parts in real time in plasma processing equipment | — | 2016-03-08 |
| 8796153 | Clamped monolithic showerhead electrode | Gregory R. Bettencourt, Michael C. Kellogg | 2014-08-05 |
| 8470127 | Cam-locked showerhead electrode and assembly | Anthony de la Llera, Pratik Mankidy, Rajlnder Dhindsa, Michael C. Kellogg, Gregory R. Bettencourt | 2013-06-25 |
| 8414719 | Clamped monolithic showerhead electrode | Gregory R. Bettencourt, Michael C. Kellogg | 2013-04-09 |
| 8343305 | Method and apparatus for diagnosing status of parts in real time in plasma processing equipment | — | 2013-01-01 |
| 8268117 | Showerhead electrodes | Greg Bettencourt, Raj Dhindsa, George Diercks, Randall A. Hardin, Jon Keihl +4 more | 2012-09-18 |
| 8221582 | Clamped monolithic showerhead electrode | Gregory R. Bettencourt, Michael C. Kellogg | 2012-07-17 |
| 8216418 | Electrode assembly and plasma processing chamber utilizing thermally conductive gasket and o-rings | Raj Dhindsa, Greg Bettencourt, Alexei Marakhtanov | 2012-07-10 |
| 8187413 | Electrode assembly and plasma processing chamber utilizing thermally conductive gasket | Raj Dhindsa, Greg Bettencourt, Alexei Marakhtanov | 2012-05-29 |
| 8152954 | Showerhead electrode assemblies and plasma processing chambers incorporating the same | Greg Bettencourt, Raj Dhindsa, George Diercks, Randall A. Hardin, Jon Keihl +4 more | 2012-04-10 |
| 7228257 | Architecture for general purpose programmable semiconductor processing system and methods therefor | Vincent Wong, Chung-Ho Huang | 2007-06-05 |
| 7190119 | Methods and apparatus for optimizing a substrate in a plasma processing system | Brett C. Richardson, Norman Williams | 2007-03-13 |
| 6309979 | Methods for reducing plasma-induced charging damage | Stanley C. Siu, Luisarita Atzei | 2001-10-30 |
| 6174450 | Methods and apparatus for controlling ion energy and plasma density in a plasma processing system | Norman Williams | 2001-01-16 |
| 6062163 | Plasma initiating assembly | Philippe Schoenborn, Mark Franklin, Frank Bose | 2000-05-16 |
| 5904571 | Methods and apparatus for reducing charging during plasma processing | Phillip Jones, Kambiz Fallahpour, Yun-Yen Jack Yang, Wen-Ben Chou | 1999-05-18 |
| 5869877 | Methods and apparatus for detecting pattern dependent charging on a workpiece in a plasma processing system | Phillip Jones | 1999-02-09 |
| 5639519 | Method for igniting low pressure inductively coupled plasma | Philippe Schoenborn, Mark Franklin, Frank Bose | 1997-06-17 |
| 5578165 | Coil configurations for improved uniformity in inductively coupled plasma systems | Frank Bose, Philippe Schoenborn, Harry Toda | 1996-11-26 |
| 5556549 | Power control and delivery in plasma processing equipment | Frank Bose | 1996-09-17 |
| 5532516 | Techniques for via formation and filling | Nicholas F. Pasch | 1996-07-02 |
| 5474648 | Uniform and repeatable plasma processing | Frank Bose, Philippe Schoenborn | 1995-12-12 |