Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12027410 | Edge ring arrangement with moveable edge rings | Haoquan Yan, Raphael Casaes, Jon McChesney, Alex Paterson | 2024-07-02 |
| 10658222 | Moveable edge coupling ring for edge process control during semiconductor wafer processing | Haoquan Yan, Raphael Casaes, Jon McChesney, Alex Paterson | 2020-05-19 |
| 9873940 | Coating system and method for coating interior fluid wetted surfaces of a component of a semiconductor substrate processing apparatus | Lin Xu, Hong Shih, Nash W. ANDERSON, Tom Stevenson, John Daugherty +1 more | 2018-01-23 |
| 9767996 | Application of powered electrostatic faraday shield to recondition dielectric window in ICP plasmas | Neil Benjamin, Jie Zhang | 2017-09-19 |
| 9546432 | Dense oxide coated component of a plasma processing chamber and method of manufacture thereof | Hong Shih, Lin Xu, John Michael Kerns, William Charles, John Daugherty +3 more | 2017-01-17 |
| 9435692 | Calculating power input to an array of thermal control elements to achieve a two-dimensional temperature output | Ole Waldmann, Eric A. Pape, Francisco Martinez | 2016-09-06 |
| 9412670 | System, method and apparatus for RF power compensation in plasma etch chamber | Arthur H. Sato, Eric Tonnis, Seetharaman Ramachandran, Shang-I Chou | 2016-08-09 |
| 9337002 | Corrosion resistant aluminum coating on plasma chamber components | John Daugherty, Hong Shih, Lin Xu, Anthony Amadio, Peter Holland +5 more | 2016-05-10 |
| 9123651 | Dense oxide coated component of a plasma processing chamber and method of manufacture thereof | Hong Shih, Lin Xu, John Michael Kerns, William Charles, John Daugherty +3 more | 2015-09-01 |
| 8060330 | Method and system for centering wafer on chuck | Jorge Luque, Shang-I Chou, Harmeet Singh | 2011-11-15 |