Issued Patents All Time
Showing 1–25 of 54 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12370573 | Equipment front end modules with induced gas mixing, and methods of use thereof | Steven Trey Tindel | 2025-07-29 |
| 12297691 | Seal mechanism for load port doors | James Christopher Hansen, Douglas B. Baumgarten | 2025-05-13 |
| 12159802 | Shortened load port for factory interface | Srinivas Poshatrahalli Gopalakrishna, Devendra Channappa Holeyannavar, Douglas B. Baumgarten, Sushant S. Koshti, Arunkumar Ramachandraiah +1 more | 2024-12-03 |
| 12159796 | Systems and methods for integrating load locks into a factory interface footprint space | Jacob Newman, Andrew J. Constant, Michael R. Rice, Shay Assaf, Sushant S. Koshti | 2024-12-03 |
| 12140339 | Filter isolation for equipment front end module | James Christopher Hansen, Steven Trey Tindel | 2024-11-12 |
| 12142508 | Factory interface robots usable with integrated load locks | Sushant S. Koshti, David Phillips, Jacob Newman, Andrew J. Constant, Michael R. Rice +6 more | 2024-11-12 |
| 12094715 | Abatement and strip process chamber in a load lock configuration | Martin Jeffrey Salinas, Andrew Nguyen, Jared Ahmad Lee | 2024-09-17 |
| 12076854 | Increased number of load ports on factory interface with robot that moves on track | Sushant S. Koshti, Maureen Frances Breiling | 2024-09-03 |
| 12074045 | Prevention of contamination of substrates during gas purging | Douglas B. Baumgarten, Russell Kaplan, Amitabh Puri | 2024-08-27 |
| 11993978 | Seal mechanism for load port doors | James Christopher Hansen, Douglas B. Baumgarten | 2024-05-28 |
| 11842913 | Seal mechanisms for load ports | Douglas B. Baumgarten, James Christopher Hansen | 2023-12-12 |
| 11810805 | Prevention of contamination of substrates during gas purging | Douglas B. Baumgarten, Russell Kaplan, Amitabh Puri | 2023-11-07 |
| 11791185 | Side storage pods, electronic device processing systems, and methods for operating the same | Dean C. Hruzek | 2023-10-17 |
| 11749537 | Side storage pods, equipment front end modules, and methods for operating equipment front end modules | Patrick D. Pannese, Murali Narasimhan, Nir Merry | 2023-09-05 |
| 11640915 | Side storage pods, equipment front end modules, and methods for operating EFEMs | Dean C. Hruzek, Nir Merry, John C. Menk, Douglas B. Baumgarten | 2023-05-02 |
| 11637029 | Load port operation in electronic device manufacturing apparatus, systems, and methods | — | 2023-04-25 |
| 11610794 | Side storage pods, equipment front end modules, and methods for operating the same | Dean C. Hruzek, Nir Merry, John C. Menk, Douglas B. Baumgarten | 2023-03-21 |
| 11581203 | Systems for integrating load locks into a factory interface footprint space | Jacob Newman, Andrew J. Constant, Michael R. Rice, Shay Assaf, Sushant S. Koshti | 2023-02-14 |
| 11574831 | Method and apparatus for substrate transfer and radical confinement | Jared Ahmad Lee, Martin Jeffrey Salinas, Imad Yousif, Aniruddha Pal | 2023-02-07 |
| 11511950 | Substrate flipping device | Michael Minh Phan, Steven Trey Tindel | 2022-11-29 |
| 11508593 | Side storage pods, electronic device processing systems, and methods for operating the same | Dean C. Hruzek | 2022-11-22 |
| 11404297 | Systems, apparatus, and methods for an improved load port | Luke Bonecutter, David Blahnik | 2022-08-02 |
| 11373891 | Front-ducted equipment front end modules, side storage pods, and methods of operating the same | Robin C. Armstrong, John C. Menk, Nir Merry | 2022-06-28 |
| 11353381 | Portable disc to measure chemical gas contaminants within semiconductor equipment and clean room | Devendra Channappa Holeyannavar, Dean C. Hruzek, Arunkumar Ramachandraiah, Jeffrey C. Hudgens, Shivaraj Manjunath Nara | 2022-06-07 |
| 11276594 | Systems, apparatus, and methods for an improved load port backplane | Douglas B. Baumgarten | 2022-03-15 |