Issued Patents All Time
Showing 26–50 of 71 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7009704 | Overlay error detection | Guoheng Zhao, Andrei V. Shchegrov, Ben-ming Benjamin Tsai | 2006-03-07 |
| 7006235 | Methods and systems for determining overlay and flatness of a specimen | Ady Levy, Kyle Brown, Gary Bultman, Dan Wack, John Fielden | 2006-02-28 |
| 6950196 | Methods and systems for determining a thickness of a structure on a specimen and at least one additional property of the specimen | John Fielden, Ady Levy, Kyle Brown, Gary Bultman, Dan Wack | 2005-09-27 |
| 6946394 | Methods and systems for determining a characteristic of a layer formed on a specimen by a deposition process | John Fielden, Ady Levy, Kyle Brown, Gary Bultman, Dan Wack | 2005-09-20 |
| 6922236 | Systems and methods for simultaneous or sequential multi-perspective specimen defect inspection | Mehdi Vaez-Iravani, Stan Stokowski, Steven Biellak, Jamie M. Sullivan, Keith Wells | 2005-07-26 |
| 6919957 | Methods and systems for determining a critical dimension, a presence of defects, and a thin film characteristic of a specimen | Ady Levy, Kyle Brown, Gary Bultman, Dan Wack, John Fielden | 2005-07-19 |
| 6917419 | Methods and systems for determining flatness, a presence of defects, and a thin film characteristic of a specimen | John Fielden, Ady Levy, Kyle Brown, Gary Bultman, Dan Wack | 2005-07-12 |
| 6917433 | Methods and systems for determining a property of a specimen prior to, during, or subsequent to an etch process | Ady Levy, Kyle Brown, Gary Bultman, Dan Wack, John Fielden | 2005-07-12 |
| 6900892 | Parametric profiling using optical spectroscopic systems | Andrei V. Shchegrov, Anatoly Fabrikant | 2005-05-31 |
| 6891610 | Methods and systems for determining an implant characteristic and a presence of defects on a specimen | Ady Levy, Kyle Brown, Gary Bultman, Dan Wack, John Fielden | 2005-05-10 |
| 6891627 | Methods and systems for determining a critical dimension and overlay of a specimen | Ady Levy, Kyle Brown, Gary Bultman, Dan Wack, John Fielden | 2005-05-10 |
| 6888627 | Optical scanning system for surface inspection | Brian C. Leslie, Keith Wells | 2005-05-03 |
| 6867862 | System and method for characterizing three-dimensional structures | — | 2005-03-15 |
| 6829559 | Methods and systems for determining a presence of macro and micro defects on a specimen | Gary Bultman, Ady Levy, Kyle Brown, Dan Wack, John Fielden | 2004-12-07 |
| 6818459 | Methods and systems for determining a presence of macro defects and overlay of a specimen | Dan Wack, Ady Levy, Kyle Brown, Gary Bultman, John Fielden | 2004-11-16 |
| 6812045 | Methods and systems for determining a characteristic of a specimen prior to, during, or subsequent to ion implantation | Ady Levy, Kyle Brown, Gary Bultman, Dan Wack, John Fielden | 2004-11-02 |
| 6806951 | Methods and systems for determining at least one characteristic of defects on at least two sides of a specimen | Dan Wack, Ady Levy, Kyle Brown, Rodney Smedt, Gary Bultman +1 more | 2004-10-19 |
| 6804003 | System for analyzing surface characteristics with self-calibrating capability | Haiming Wang, Patrick M. Maxton, Kenneth C. Johnson | 2004-10-12 |
| 6782337 | Methods and systems for determining a critical dimension an a presence of defects on a specimen | Dan Wack, Ady Levy, Kyle Brown, Gary Bultman, John Fielden | 2004-08-24 |
| 6753528 | System for MEMS inspection and characterization | Guoheng Zhao | 2004-06-22 |
| 6734968 | System for analyzing surface characteristics with self-calibrating capability | Haiming Wang, Patrick M. Maxton, Kenneth C. Johnson | 2004-05-11 |
| 6721052 | Systems for measuring periodic structures | Guoheng Zhao, Kenneth P. Gross, Rodney Smedt | 2004-04-13 |
| 6710876 | Metrology system using optical phase | Guoheng Zhao, Ian Smith, Mehdi Vaez-Iravani | 2004-03-23 |
| 6707540 | In-situ metalization monitoring using eddy current and optical measurements | Kurt Lehman, Shing Lee, Walter H. Johnson, John Fielden, Guoheng Zhao | 2004-03-16 |
| 6694284 | Methods and systems for determining at least four properties of a specimen | Ady Levy, Kyle Brown, Gary Bultman, Dan Wack, John Fielden | 2004-02-17 |